Composite spacer enabling uniform doping in recessed fin devices
US-11038041-B2 · Jun 15, 2021 · US
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Patent family 58096355
This patent family groups 8 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58096355 |
| Family type | — |
| Earliest priority | Sep 2, 2015 |
| First filing country | US |
| Member publications | 8 |
| Countries | US |
| Representative publication | US11038041B2 — Composite spacer enabling uniform doping in recessed fin devices |
Representative publication
Best representative member for this family based on priority and filing country.
US11038041B2 — Composite spacer enabling uniform doping in recessed fin devices (published Jun 15, 2021)
Member publications
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US-2018061966-A1 · Mar 1, 2018 · US
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US-9620644-B2 · Apr 11, 2017 · US
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US-2017062601-A1 · Mar 2, 2017 · US
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