Method of semiconductor fabrication with height control through active region profile
US-9978652-B2 · May 22, 2018 · US
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Patent family 56552467
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56552467 |
| Family type | — |
| Earliest priority | Feb 13, 2015 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US9978652B2 — Method of semiconductor fabrication with height control through active region profile |
Representative publication
Best representative member for this family based on priority and filing country.
US9978652B2 — Method of semiconductor fabrication with height control through active region profile (published May 22, 2018)
Member publications
Related publications in this family.
Method of Semiconductor Fabrication with Height Control Through Active Region Profile
US-2017309526-A1 · Oct 26, 2017 · US
Method of semiconductor fabrication with height control through active region profile
US-9673112-B2 · Jun 6, 2017 · US
Method of Semiconductor Fabrication with Height Control Through Active Region Profile
US-2016240444-A1 · Aug 18, 2016 · US