System with an increased surface density of microelectromechanical or nanoelectromechanical devices
US-10280073-B2 · May 7, 2019 · US
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Patent family 55953181
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55953181 |
| Family type | — |
| Earliest priority | Dec 24, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10280073B2 — System with an increased surface density of microelectromechanical or nanoelectromechanical devices |
Representative publication
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US10280073B2 — System with an increased surface density of microelectromechanical or nanoelectromechanical devices (published May 7, 2019)
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