System with an increased surface density of microelectromechanical or nanoelectromechanical devices

Patent metadata

Field	Value
Publication number	US-10280073-B2
Application number	US-201615389605-A
Country	US
Kind code	B2
Filing date	Dec 23, 2016
Priority date	Dec 24, 2015
Publication date	May 7, 2019
Grant date	May 7, 2019

Abstract

A nanoelectronic system comprised of n microelectromechanical or nanoelectromechanical devices arranged on a connection support to electrically connect the n devices, each device with an interaction area, at least one mechanical anchor and a first terminal, a second terminal and a third terminal, the relative arrangement of the first, second and third terminals, the anchor area and the interaction area being identical or similar for the n sensors, the first terminal of each device being intended to recover a signal emitted by each representative device of the interaction area state. At least part of the devices are arranged in such a way that the geometric location of the first terminal of one of the adjacent devices is identical to the geometric location of the first terminal of said other adjacent device, the first terminals being coincident.

First claim

The invention claimed is:

1. A microelectronic system comprising:
n devices comprising microelectromechanical or nanoelectromechanical devices, n being greater than or equal to 3, the devices arranged on a connection support electrically connecting the n devices,
each device comprising
an interaction area,
at least one mechanical anchor,
at least one first electrical terminal configured to recover an output signal emitted by the respective device,
a second electrical terminal, and
a third electrical terminal, wherein

each of the first electrical terminal, the second electrical terminal, and the third electrical terminal is located on the connection support and is electrically connected to a conductive track in the connection support,
a first pair of adjacent devices being adjacent in a first direction and having in common one of a second electrical terminal and a third electrical terminal,
a second pair of adjacent devices having in common a mechanical anchor,
a third pair of adjacent devices being adjacent in a second direction perpendicular to the first direction and having in common a first electrical terminal,
the first pair of adjacent devices having one device in common with the second pair of adjacent devices and having one device different from the second pair of adjacent devices,
the third pair of adjacent devices having the one device in common with the second pair of adjacent devices and the first pair of adjacent devices and having one device different from the second pair of adjacent devices and the first pair of adjacent devices,
each first electrical terminal, second electrical terminal, and third electrical terminal is common to at most two devices, and
each mechanical anchor is common to at most two devices.

2. The microelectronic system according to claim 1 , wherein a relative arrangement of the at least one first terminal, the second terminal, and the third terminal, of the anchor area and the interaction area are identical for the n devices.

3. The microelectronic system according to claim 1 , in which, among the n devices, at least some of the devices are arranged so that the at least one first terminal and the second terminal of the first pair of the adjacent devices are coincident, the geometric location of the at least one first terminal and the second terminal of one of the first pair of the adjacent devices being identical to the geometric location of the at least one first terminal and the second terminal of the other of the first pair of said adjacent devices respectively.

4. The microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that longitudinal directions of the interaction areas are coincident or parallel.

5. The microelectronic system according to claim 4 , in which the at least one first terminal and the mechanical anchor are each arranged at a longitudinal end of the interaction area, the second and third terminals being arranged laterally relative to the interaction area.

6. The microelectronic system according to claim 1 , in which the devices are placed on the connection support according to an in line and column distribution.

7. The microelectronic system according to claim 1 , in which the at least one first terminal of a device is coincident with the at least one first terminal of an adjacent device that is different from another adjacent device comprising the second terminal with which the second terminal of the device is coincident.

8. The microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that longitudinal directions of the interaction areas are coincident or parallel, each device comprising a fourth terminal and a fifth terminal, the second terminal and the third terminal being arranged on one side of the interaction area and the fourth terminal and the fifth terminal being arranged on other side of the interaction area.

9. The microelectronic system according to claim 8 , in which the second terminal and the third terminal are coincident respectively with the second terminal and the third terminal of a first adjacent device and the fourth terminal and the fifth terminal being coincident with the fourth terminal and the fifth terminal of a second adjacent device different from the first adjacent device.

10. The microelectronic system according to claim 1 , in which the n devices are addressable individually and connected by the connection support.

11. A microelectronic system according to claim 10 , in which the devices are resonant type, the interaction area being carried by a suspended element configured to be put into vibration and in which the second terminal feeds excitation means of the interaction area, each device having its own resonance frequency.

12. The microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that longitudinal directions of the interaction areas are coincident or parallel, each device comprising a fourth terminal and a fifth terminal, the second terminal and the third terminal being arranged on one side of the interaction area and the fourth terminal and the fifth terminal being arranged on other side of the interaction area, in which the second terminal and the third terminal are coincident respectively with the second terminal and the third terminal of a first adjacent device and the fourth terminal and the fifth terminal being coincident with the fourth terminal and the fifth terminal of a second adjacent device different from the first adjacent device, and in which the third terminal or the fifth terminal is connected to an interaction area displacement detector.

13. The microelectronic system according to claim 12 , in which, for each device, a piezoresistive gauge links the interaction element and the third terminal or a piezoresistive gauge links the interaction element and the fifth terminal.

14. The microelectronic system according to claim 1 , in which the connection support is comprised of at least one connection level linked to the terminals using vias.

15. The microelectronic system according to claim 14 , in which the connection support has several levels of connections linked to the terminals using vias.

16. The microelectronic system according to claim 15 , in which the connection support is of type CMOS.

17. A medium analysis system, comprised of the microelectronic system according to claim 1 and a control unit connected to the devices by the connection support.

18. The medium analysis system according to claim 17 , configured to analyse a gas and biological cells contained in the gas.

19. The medium analysis system according to claim 17 , configured to analyse a liquid and biological cells contained in the liquid.

20. An actuator system, comprised of the microelectronic system according to claim 1 and a control unit connected to the devices by the connection support.

Assignees

• Commissariat Energie Atomique

Inventors

• Ludurczak Willy
• Hentz Sebastien

Classifications

• B81C2201/019

  Bonding or gluing multiple substrate layers · CPC title

• B81B2201/0214

  Biosensors; Chemical sensors · CPC title

• B81B2203/0307

  Anchors · CPC title

• B81B2207/053

  of movable structures · CPC title

• B81B2207/07

  Interconnects · CPC title