System with an increased surface density of microelectromechanical or nanoelectromechanical devices

Patent metadata

Field	Value
Publication number	US-2017183221-A1
Application number	US-201615389605-A
Country	US
Kind code	A1
Filing date	Dec 23, 2016
Priority date	Dec 24, 2015
Publication date	Jun 29, 2017
Grant date	—

Abstract

A nanoelectronic system comprised of n microelectromechanical or nanoelectromechanical devices arranged on a connection support to electrically connect the n devices, each device with an interaction area, at least one mechanical anchor and a first terminal, a second terminal and a third terminal, the relative arrangement of the first, second and third terminals, the anchor area and the interaction area being identical or similar for the n sensors, the first terminal of each device being intended to recover a signal emitted by each representative device of the interaction area state. At least part of the devices are arranged in such a way that the geometric location of the first terminal of one of the adjacent devices is identical to the geometric location of the first terminal of said other adjacent device, the first terminals being coincident.

First claim

1 . A microelectronic system comprised of n microelectromechanical or nanoelectromechanical devices, so-called devices, n being greater than or equal to 2, arranged on a connection support configured to electrically connect the n devices, each device comprising an interaction area, at least one mechanical anchor, at least one first electric terminal configured to recover a signal emitted by each device representative of the state of the interaction area, at least a second electrical terminal and a third electrical terminal, each terminal having a given function, in which, amongst the n devices, at least some of the devices is arranged in such a way that the geometric location of at least one of the terminals among the first, second and third terminals of one of the adjacent devices is identical to the geometric location of the other terminal of said other adjacent device having the same function, said terminals of said two adjacent devices being coincident, in which, among the n devices, at least some of the devices is arranged so that the mechanical anchorages of the two adjacent devices are coincident, the geometric location of mechanical anchor of said adjacent devices being identical to the geometric location of the mechanical anchors of the other of said adjacent devices.

2 . A microelectronic system according to claim 1 , wherein the relative arrangement of the first, second and third terminals, of the anchor area and the interaction area are identical or similar for the n devices.

3 . A system according to claim 1 , in which, among the n devices, at least some of the devices are arranged so that the first and/or the second and/or the third terminal of two adjacent devices are coincident, the geometric location of the first and/or the second and/or the third terminal of one of the adjacent devices being identical to the geometric location of the first and/or the second and/or the third terminal of the other of said adjacent devices respectively.

4 . A microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that the longitudinal directions of the interaction areas are coincident or parallel.

5 . A microelectronic system according to claim 4 , in which the first terminal and the mechanical anchor are each arranged at a longitudinal end of the interaction area, the second and third terminals being arranged laterally relative to the interaction area.

6 . A microelectronic system according to claim 1 , in which devices are placed on the connection support according to an in line and column distribution, the first terminal of a device being coincident with a first terminal of an adjacent device that is different from the adjacent device with the mechanical anchoring with which the mechanical anchor of said device is coincident.

7 . A microelectronic system according to claim 1 , in which among the n devices, at least some of the devices are arranged so that the first and/or the second and/or the third terminal of two adjacent devices are coincident, the geometric location of the first and/or the second and/or the third terminal of one of the adjacent devices being identical to the geometric location of the first and/or the second and/or the third terminal of the other of said adjacent devices respectively, and in which the first terminal of a device is coincident with a first terminal of an adjacent device that is different from that comprising the second and/or the third terminal with which the second terminal and/or the third terminal are coincident.

8 . A microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that the longitudinal directions of the interaction areas are coincident or parallel, the system comprising a fourth and fifth terminal, the second and the third terminals being arranged on one side of the interaction area and the fourth and the fifth terminals being arranged on the other side of the interaction area.

9 . A microelectronic system according to claim 8 , in which the second and third terminals are coincident respectively with the second and third terminals of the same adjacent device and the fourth and fifth terminals being coincident with the fourth and fifth terminals of an adjacent device different from the one with which said device has its second and third terminals which are coincident.

10 . A microelectronic system according to claim 1 , in which the n devices are addressable individually and connected by the connection support.

11 . A microelectronic system according to claim 10 , in which devices are resonant type, the interaction area being carried by a suspended element configured to be put into vibration and in which the second and/or fourth terminal feed the excitation means of the interaction area, each device having its own resonance frequency.

12 . A microelectronic system according to claim 1 , in which interaction areas each extend in a longitudinal direction, the devices being arranged so that the longitudinal directions of the interaction areas are coincident or parallel, the system comprising a fourth and fifth terminal, the second and the third terminals being arranged on one side of the interaction area and the fourth and the fifth terminals being arranged on the other side of the interaction area, in which the second and third terminals are coincident respectively with the second and third terminals of the same adjacent device and the fourth and fifth terminals being coincident with the fourth and fifth terminals of an adjacent device different from the one with which said device has its second and third terminals which are coincident, and in which the third and/or fifth terminals are connected to the interaction area displacement detector.

13 . A microelectronic system according to claim 12 , in which a piezoresistive gauge links the interaction element and the third terminal and/or a piezoresistive gauge links the interaction element and the fifth terminal.

14 . A microelectronic system according to claim 1 , in which the connection support is comprised of at least one connection level linked to the terminals using vias.

15 . A microelectronic system according to claim 14 , in which the connection support has several levels of connections linked to the terminals d) using vias.

16 . A microelectronic system according to claim 15 , in which the connection support is of type CMOS.

17 . A medium analysis system, comprised of a microelectronic system according to claim 1 and a control unit connected to the devices by the connection support.

18 . A medium analysis system according to claim 17 , wherein the medium to analyse is a gas and the analysis pertains to biological cells contained in the gaseous medium.

19 . A medium analysis system according to claim 17 , wherein the medium to analyse is liquid and the analysis pertains to biological cells contained in the liquid medium.

20 . An actuator system, comprised of a microelectronic system according to claim 1 and a control unit connected to the devices by the connection support.

Assignees

• Commissariat Energie Atomique

Inventors

• Ludurczak Willy
• Hentz Sebastien

Classifications

• H03H9/2463

  Clamped-clamped beam resonators · CPC title

• B81C1/00238

  Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure · CPC title

• B81B2203/0307

  Anchors · CPC title

• H03H3/02

  for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title

• B81B2207/07

  Interconnects · CPC title