Process based metrology target design
US-10296681-B2 · May 21, 2019 · US
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Patent family 54366191
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54366191 |
| Family type | — |
| Earliest priority | Nov 17, 2014 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10296681B2 — Process based metrology target design |
Representative publication
Best representative member for this family based on priority and filing country.
US10296681B2 — Process based metrology target design (published May 21, 2019)
Member publications
Related publications in this family.
Process based metrology target design
US-2018268093-A1 · Sep 20, 2018 · US
Process based metrology target design
US-10007744-B2 · Jun 26, 2018 · US
Process based metrology target design
US-2016140267-A1 · May 19, 2016 · US