Film deposition device
US-9752229-B2 · Sep 5, 2017 · US
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Patent family 52461069
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52461069 |
| Family type | — |
| Earliest priority | Aug 6, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9752229B2 — Film deposition device |
Representative publication
Best representative member for this family based on priority and filing country.
US9752229B2 — Film deposition device (published Sep 5, 2017)
Member publications
Related publications in this family.
Film deposition device
US-2016160343-A1 · Jun 9, 2016 · US