Block copolymer, method of forming the same, and method of forming pattern
US-9725550-B2 · Aug 8, 2017 · US
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Patent family 51164396
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51164396 |
| Family type | — |
| Earliest priority | Jan 11, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9725550B2 — Block copolymer, method of forming the same, and method of forming pattern |
Representative publication
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US9725550B2 — Block copolymer, method of forming the same, and method of forming pattern (published Aug 8, 2017)
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