Integrated vacuum microelectronic structure and manufacturing method thereof
US-9865421-B2 · Jan 9, 2018 · US
This page is not indexed by search engines while we improve data quality.
Patent family 50897726
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50897726 |
| Family type | — |
| Earliest priority | Mar 31, 2014 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US9865421B2 — Integrated vacuum microelectronic structure and manufacturing method thereof |
Representative publication
Best representative member for this family based on priority and filing country.
US9865421B2 — Integrated vacuum microelectronic structure and manufacturing method thereof (published Jan 9, 2018)
Member publications
Related publications in this family.
Integrated vacuum microelectronic structure and manufacturing method thereof
US-2017032921-A1 · Feb 2, 2017 · US
Integrated vacuum microelectronic structure and manufacturing method thereof
US-9496392-B2 · Nov 15, 2016 · US
Integrated vacuum microelectronic structure and manufacturing method thereof
US-2015279988-A1 · Oct 1, 2015 · US