Semiconductor processing with DC assisted RF power for improved control
US-10032606-B2 · Jul 24, 2018 · US
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Patent family 50028443
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50028443 |
| Family type | — |
| Earliest priority | Aug 2, 2012 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10032606B2 — Semiconductor processing with DC assisted RF power for improved control |
Representative publication
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US10032606B2 — Semiconductor processing with DC assisted RF power for improved control (published Jul 24, 2018)
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