Micromechanical semiconductor sensing device
US-9790086-B2 · Oct 17, 2017 · US
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Patent family 48522351
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 48522351 |
| Family type | — |
| Earliest priority | Dec 19, 2011 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US9790086B2 — Micromechanical semiconductor sensing device |
Representative publication
Best representative member for this family based on priority and filing country.
US9790086B2 — Micromechanical semiconductor sensing device (published Oct 17, 2017)
Member publications
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Micromechanical semiconductor sensing device
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Micromechanical Semiconductor Sensing Device
US-2015217994-A1 · Aug 6, 2015 · US
Micromechanical semiconductor sensing device
US-9021887-B2 · May 5, 2015 · US