This page is not indexed by search engines while we improve data quality.

Patent family 46302003

This patent family groups 8 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	46302003
Family type	—
Earliest priority	Nov 12, 2002
First filing country	US
Member publications	8
Countries	US
Representative publication	US2018129143A1 — Lithographic apparatus and device manufacturing method

Representative publication

Best representative member for this family based on priority and filing country.

US2018129143A1 — Lithographic apparatus and device manufacturing method (published May 10, 2018)

Related publications in this family.