Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step
US-9786525-B2 · Oct 10, 2017 · US
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Patent family 44202063
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 44202063 |
| Family type | — |
| Earliest priority | Apr 15, 2011 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9786525B2 — Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step |
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US9786525B2 — Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step (published Oct 10, 2017)
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