Inductively Coupled Plasma Light Source
US-2025069870-A1 · Feb 27, 2025 · US
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the field being produced by using an excitation coil
the field being produced by using an excitation coil · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J65/048 |
| Official title | {the field being produced by using an excitation coil} |
| Display label | the field being produced by using an excitation coil |
| Total patents | 17 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly declining.
| Year | Patents |
|---|---|
| 2016 | 4 |
| 2017 | 3 |
| 2018 | 4 |
| 2023 | 3 |
| 2024 | 2 |
| 2025 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Inductively coupled plasma light source
US-12165856-B2 · Dec 10, 2024 · US
Hybrid power supply systems, methods, and devices for excimer lamps
US-12133927-B2 · Nov 5, 2024 · US
Inactivation method and inactivation system
US-2023414805-A1 · Dec 28, 2023 · US
Inductively Coupled Plasma Light Source
US-2023268167-A1 · Aug 24, 2023 · US
Hybrid power supply systems, methods, and devices for excimer lamps
US-2023118585-A1 · Apr 20, 2023 · US
Inductively coupled dielectric barrier discharge lamp
US-10160667-B2 · Dec 25, 2018 · US
Inductively coupled dielectric barrier discharge lamp
US-2018319678-A1 · Nov 8, 2018 · US
Inductively coupled dielectric barrier discharge lamp
US-10035715-B2 · Jul 31, 2018 · US
High frequency, repetitive, compact toroid-generation for radiation production
US-9929004-B2 · Mar 27, 2018 · US
High frequency, repetitive, compact toroid-generation for radiation production
US-2017243731-A1 · Aug 24, 2017 · US
High frequency, repetitive, compact toroid-generation for radiation production
US-9655221-B2 · May 16, 2017 · US
Inductively coupled dieletric barrier discharge lamp
US-2017015566-A1 · Jan 19, 2017 · US
Inductively coupled dielectric barrier discharge lamp
US-9493366-B2 · Nov 15, 2016 · US
Optical arrangement, in particular plasma light source or euv lithography system
US-2016207078-A1 · Jul 21, 2016 · US
Hollow-core fiber lamp
US-9372299-B1 · Jun 21, 2016 · US
Multiple strike ballast with lamp protection for electrodeless lamp
US-9301375-B2 · Mar 29, 2016 · US