High frequency, repetitive, compact toroid-generation for radiation production

Patent metadata

Field	Value
Publication number	US-9655221-B2
Application number	US-201414461101-A
Country	US
Kind code	B2
Filing date	Aug 15, 2014
Priority date	Aug 19, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.

First claim

That which is claimed:

1. A radiation source comprising:
a gas source;
a confinement tube coupled with the gas source and configured to contain gas introduce into the confinement tube from the gas source; and
a resonant inductor having a plurality of windings around the confinement tube that is configured to ionize gas disposed within the confinement tube, generate a compact toroid within the ionized gas, and produce radiation from the compact toroid.

2. The radiation source according to claim 1 , wherein the resonant inductor comprises a plurality of windings that is non-uniform in the diameter of the plurality of windings along at least one dimension.

3. The radiation source according to claim 1 , wherein the resonant inductor comprises a plurality of windings that is non-uniform in the number of the plurality of windings along at least one dimension.

4. The radiation source according to claim 1 , further comprising one or more optical elements arranged to direct the radiation to an intermediate focus.

5. The radiation source according to claim 1 , further comprising an imaging chamber, wherein the resonant inductor is configured to direct compact toroids from the containment tube to the imaging chamber.

6. The radiation source according to claim 1 , wherein the resonant inductor comprises a coil having one or more windings, and wherein the radiation source further comprises switching circuitry electrically coupled with the resonant inductor and configured to:
generate a high current pulse within the coil of the resonant inductor; and
switch the high current pulse at high frequencies.

7. The radiation source according to claim 6 , wherein the high frequency comprises a frequency greater than 500 kHz.

8. The radiation source according to claim 6 , wherein the high current pulse comprises current above 500 amps.

9. The radiation source according to claim 6 , further comprising an outer inductor coil.

10. A method comprising:
ionizing a gas within a confinement chamber;
generating a plurality of compact toroids from the ionized gas using a resonant inductor; and
focusing radiation produced by each of the plurality of compact toroids to a target or an intermediate focus.

11. The method according to claim 10 , wherein the radiation produced by each of the compact toroids comprises radiation selected from the group consisting of ultraviolet radiation, extreme ultraviolet radiation, X-ray radiation, and soft X-ray radiation.

12. The method according to claim 10 , wherein the gas comprises a gas selected from the list consisting of noble gas, xenon, hydrogen, helium, neon, krypton, argon, tin, stannane (SnH 4 ), fluorine, hydrogen chloride, carbon tetrafluoride, lithium, hydrogen sulfide, mercury, gallium, indium, cesium, potassium, astatine, and radon.

13. The method according to claim 10 , wherein the resonant inductor comprises a plurality of windings that is non-uniform in the number of the plurality of windings along at least one dimension.

14. The method according to claim 10 , wherein the resonant inductor comprises a plurality of windings that is non-uniform in the diameter of the plurality of windings along at least one dimension.

15. The method according to claim 10 , wherein the generating a compact toroid using the resonant inductor further comprises:
generating a high current pulse within coils of the resonant inductor; and
switching the high current pulse at high frequencies.

16. A method comprising:
introducing gas into a confinement chamber;
ionizing the gas within the confinement chamber;
generating a first compact toroid from the ionized gas using a compact toroid;
focusing radiation produced by the first compact toroid to a target;
ionizing the gas within the confinement chamber;
generating a second compact toroid from the ionized gas; and
focusing radiation produced by the second compact toroid to the target.

17. The method according to claim 16 , further comprising introducing gas into the confinement chamber prior to ionizing the gas within the confinement chamber.

18. The method according to claim 16 , wherein the radiation produced by the first compact toroid and the radiation produced by the second compact toroid comprises radiation selected from the group consisting of ultraviolet radiation, extreme ultraviolet radiation, X-ray radiation, and soft X-ray radiation.

Assignees

• Eagle Harbor Tech Inc

Inventors

• Ziemba Timothy
• Miller Kenneth E
• Carscadden John G
• Prager James
• Macnab Angus

Classifications

• H05G2/007

  involving electric or magnetic fields in the process of plasma generation · CPC title

• H01J65/048 Primary

  the field being produced by using an excitation coil · CPC title

• H05G2/003 Primary

  the plasma being generated from a material in a liquid or gas state · CPC title