High frequency, repetitive, compact toroid-generation for radiation production

Patent metadata

Field	Value
Publication number	US-9929004-B2
Application number	US-201715589533-A
Country	US
Kind code	B2
Filing date	May 8, 2017
Priority date	Aug 19, 2013
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.

First claim

That which is claimed:

1. A radiation source comprising:
a gas source;
a confinement tube coupled with the gas source and configured to contain a gas introduced into the confinement tube from the gas source;
a resonant inductor having a conductor shaped into coil disposed around the confinement tube, the coil comprising:
a first plurality of windings having a first diameter;
a second plurality of windings, each winding of the second plurality of windings having a diameter less than the first diameter; and
a third plurality of windings having a third diameter; and

switching circuitry electrically coupled with the resonant inductor that generates high current pulses within the coil of the resonant inductor, and switches the high current pulses at high frequencies.

2. The radiation source according to claim 1 , wherein the resonant inductor is configured to ionize gas disposed within the confinement tube, generate a compact toroid within the ionized gas, and produce radiation from the compact toroid.

3. The radiation source according to claim 1 , wherein the third diameter is substantially the same as the first diameter.

4. The radiation source according to claim 1 , wherein the third diameter is less than the first diameter.

5. The radiation source according to claim 1 , wherein the second plurality of windings have a diameter that varies among each winding of the second plurality of windings.

6. The radiation source according to claim 1 , wherein the second plurality of windings have a conical or tapered shape.

7. The radiation source according to claim 1 , further comprising an imaging chamber, wherein the resonant inductor is configured to direct compact toroids from the containment tube to the imaging chamber.

8. The radiation source according to claim 1 , wherein the high frequencies comprise frequencies greater than 500 kHz.

9. The radiation source according to claim 1 , wherein the high current pulse comprises current above 500 amps.

10. The radiation source according to claim 1 , further comprising an outer inductor coil, wherein the confinement tube and the resonant inductor are disposed within the outer inductor coil.

11. The radiation source according to claim 10 , wherein the outer inductor coil is configured to create a first bias magnetic field within the confinement tube, and wherein the resonant inductor is configured to create a second magnetic field within the confinement tube, wherein the second magnetic field has a polarity opposite the polarity of the first magnetic field.

12. A radiation source comprising:
a gas source;
a confinement tube coupled with the gas source and configured to contain a gas introduced into the confinement tube from the gas source;
a first resonant inductor wrapped around a portion of the confinement tube;
a second resonant inductor wrapped around a portion of the confinement tube; and
a central resonant inductor wrapped around a portion of the confinement tube and disposed between the first resonant inductor and the second resonant inductor.

13. The radiation source according to claim 12 , wherein the first resonant inductor has more windings than the central resonant inductor and the second resonant inductor has more windings than the central resonant inductor.

14. The radiation source according to claim 12 , wherein the first resonant inductor and the second resonant inductor are disposed at opposite the ends of the confinement tube.

15. The radiation source according to claim 12 , wherein the first resonant inductor and the second resonant inductor are configured to produce a magnetic field at the ends of the confinement tube greater than a magnetic field near the central portion of the confinement tube.

16. The radiation source according to claim 12 , wherein the central resonant inductor has a tapered shape such that the diameter of the central resonant inductor is greater near the second resonant inductor and smaller near the first resonant inductor.

17. A method for creating ultraviolet light, the method comprising:
introducing a gas into a confinement chamber;
ionizing the gas within the confinement chamber;
generating a plurality of compact toroids in the ionized gas by pulsing high current and high frequencies within coils of a resonant inductor wrapped around the confinement chamber; and
focusing ultraviolet radiation produced by each of the plurality of compact toroids toward a target or an intermediate focus.

18. The method according to claim 17 , wherein the generating a plurality of compact toroids from the ionized gas using a resonant inductor further comprises:
generating a high current pulse within coils of the resonant inductor; and
switching the high current pulse at high frequencies.

19. The method according to claim 18 , wherein the high current comprises a current greater than 500 amps.

20. The method according to claim 18 , wherein the high frequency comprises a frequency greater than 1 MHz.

Assignees

• Eagle Harbor Tech Inc

Inventors

• Ziemba Timothy
• Miller Kenneth E
• Carscadden John G
• Prager James
• Macnab Angus

Classifications

• H01J65/048 Primary

  the field being produced by using an excitation coil · CPC title

• H05G2/003

  the plasma being generated from a material in a liquid or gas state · CPC title

• H05G2/007

  involving electric or magnetic fields in the process of plasma generation · CPC title