Extreme ultraviolet source temperature monitoring using confocal sensor
US-12572066-B2 · Mar 10, 2026 · US
with electrical conversion means for final indication · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G01K5/52 |
| Official title | with electrical conversion means for final indication |
| Display label | with electrical conversion means for final indication |
| Total patents | 26 |
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 1 |
| 2018 | 1 |
| 2019 | 1 |
| 2020 | 6 |
| 2021 | 4 |
| 2022 | 1 |
| 2023 | 4 |
| 2024 | 4 |
| 2025 | 3 |
| 2026 | 1 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-12572066-B2 · Mar 10, 2026 · US
US-12270713-B2 · Apr 8, 2025 · US
US-2025067602-A1 · Feb 27, 2025 · US
US-2025065413-A1 · Feb 27, 2025 · US
US-12092529-B2 · Sep 17, 2024 · US
US-12066336-B2 · Aug 20, 2024 · US
US-12025504-B2 · Jul 2, 2024 · US
US-2024201581-A1 · Jun 20, 2024 · US
US-11714008-B2 · Aug 1, 2023 · US
US-2023194355-A1 · Jun 22, 2023 · US
US-2023168136-A1 · Jun 1, 2023 · US
US-2023112390-A1 · Apr 13, 2023 · US
US-11228172-B2 · Jan 18, 2022 · US
US-2021237086-A1 · Aug 5, 2021 · US
US-2021190600-A1 · Jun 24, 2021 · US
US-10921194-B2 · Feb 16, 2021 · US
US-10883543-B2 · Jan 5, 2021 · US
US-10809135-B2 · Oct 20, 2020 · US
US-2020284663-A1 · Sep 10, 2020 · US
US-10684176-B2 · Jun 16, 2020 · US
Answers are generated from the same data shown on this page.