Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber
US-11603313-B2 · Mar 14, 2023 · US
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by oxidation
by oxidation · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C01B23/0021 |
| Official title | {by oxidation} |
| Display label | by oxidation |
| Total patents | 10 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 1 |
| 2016 | 1 |
| 2017 | 1 |
| 2018 | 2 |
| 2020 | 1 |
| 2021 | 2 |
| 2022 | 1 |
| 2023 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method for refining argon gas and recovering and refining apparatus for argon gas
US-11305994-B2 · Apr 19, 2022 · US
Helium purification process and unit
US-2021354987-A1 · Nov 18, 2021 · US
Helium purification process and unit
US-11021366-B2 · Jun 1, 2021 · US
Helium purification process and unit
US-2020385269-A1 · Dec 10, 2020 · US
Method for refining argon gas and recovering and refining apparatus for argon gas
US-2018050912-A1 · Feb 22, 2018 · US
Method for recovering and purifying argon gas from silicon single crystal manufacturing apparatus and apparatus for recovering and purifying argon gas
US-9890044-B2 · Feb 13, 2018 · US
Integrated process and apparatus for recovery of helium rich streams
US-9623370-B2 · Apr 18, 2017 · US
Method for recovering and purifying argon gas from silicon single crystal manufacturing apparatus and apparatus for recovering and purifying argon gas
US-2016325996-A1 · Nov 10, 2016 · US
Inert gas recovery and recycle for silicon crystal growth pulling process
US-9114989-B2 · Aug 25, 2015 · US