Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber
US-11603313-B2 · Mar 14, 2023 · US
US9623370B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9623370-B2 |
| Application number | US-201514618702-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 10, 2015 |
| Priority date | Feb 10, 2015 |
| Publication date | Apr 18, 2017 |
| Grant date | Apr 18, 2017 |
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The present invention relates a process and apparatus that recovers a helium rich stream from a mixed gas having low concentrations of helium therein. More specifically, the invention relates to an integrated process and apparatus for treating a mixed feed gas from an operating process that produces a fluid product from natural gas containing helium, such as processes that produce ammonia, methanol, or liquid hydrocarbons.
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What is claimed is: 1. An integrated system for recovery of a helium rich stream and a hydrogen rich stream from a feed stream containing 10-80 volume percent hydrogen, 0.1-5.0 volume percent helium, and the balance higher boiling components, comprising: (a) routing the compressed and warmed feed stream to a first hydrogen transport membrane system having one or more hydrogen transport membranes for carrying out the bulk separation between a first hydrogen permeate stream and a first helium-containing retentate stream; (b) cooling and routing the first helium-containing retentate stream to a size selective polymeric membrane system having one or more polymeric membrane stages to remove the higher boiling components and to produce a resulting second permeate stream composed of primarily hydrogen and helium and a second retentate stream; (c) compressing the resulting second permeate stream in step (b) and feeding same to a second hydrogen transport membrane system having one or more hydrogen transport membranes to further recover one or more hydrogen permeate streams and a helium rich retentate product having about 80% helium or higher volume by content. 2. The integrated system of claim 1 , further comprising: providing two hydrogen transport membranes disposed in series in the first hydrogen transport membrane system, where one of the membranes is purged and the other is unpurged. 3. The integrated system of claim 1 , further comprising: passing the second permeate stream in step (b) through the second hydrogen transport membrane system and separating a third permeate stream from a third helium containing retentate stream having less than 20% hydrogen content by volume therein. 4. The integrated system of claim 1 , further comprising: processing the first helium-containing retentate stream in the size selective polymeric membrane system, wherein this system includes three membrane stages with an internal compressor. 5. The integrated system of claim 4 , further comprising: introducing the first helium-containing retentate stream into a first stage polymeric membrane and separating same into a first stage retentate stream and first stage permeate stream. 6. The integrated system of claim 5 , further comprising introducing the first stage retentate stream into a second stage polymeric membrane and separating same into a second stage retentate stream and a second stage permeate stream where the second stage permeate stream is compressed, mixed with the first helium-containing retentate stream in step (b) and recycled to the first stage polymeric membrane, while the second retentate stream can be utilized as a fuel. 7. The integrated system of claim 6 , further comprising: introducing the first stage permeate stream into a third stage polymeric membrane and separating same into a third stage retentate stream which is compressed, and recycled to the first stage polymeric membrane, and a resulting second permeate stream in step (b) having about 80% or higher hydrogen and helium content by volume. 8. The integrated system of claim 7 , further comprising: compressing the resulting second permeate stream in step (b) and feeding same to the second hydrogen transport membrane system, wherein the system has two hydrogen membranes disposed in series and where one membrane is purged and the other is unpurged. 9. The integrated system of claim 8 , wherein the resulting second permeate stream in step (b) is separated into third helium containing retentate stream and a third permeate stream. 10. The integrated system of claim 9 , wherein the third helium retentate stream is routed to an oxidation unit where substantially all the remaining hydrogen is removed from the resulting effluent. 11. The integrated system of claim 10 , further comprising: feeding the effluent to a gas phase separator and a dryer disposed in series, to form a crude helium product. 12. The integrated system of claim 11 , wherein the crude helium product is routed to a purifier to produce a helium rich product having about 98% or higher content by volume and recycling a compressed tail gas to step (a). 13. An integrated system for recovery of a helium rich stream and a hydrogen rich stream from a feed stream containing 10-80 volume percent hydrogen, 0.1-5.0 volume percent helium, and the balance being higher boiling components, comprising: (a) routing the compressed and warmed feed stream to a hydrogen transport membrane system having one or more hydrogen transport membranes for carrying out the bulk separation between a hydrogen permeate stream and a helium-containing retentate stream; (b) cooling the helium-containing retentate stream and processing same in at least one catalytic oxidation unit to remove substantially all the hydrogen in the helium-containing retentate stream; (c) routing the helium-containing retentate stream depleted of hydrogen to a phase separator to remove substantially all the water, and optionally a dryer disposed downstream of the phase separator to remove the remaining moisture; and (d) routing a dried helium-containing retentate stream from step (c) to a polymeric membrane system having one or more polymeric membrane stages and removing the higher boiling components to produce a helium rich product stream having about 80% or higher content by volume. 14. The integrated system of claim 13 , further comprising: providing two hydrogen transport membranes disposed in series in the hydrogen transport membrane system, where feed stream is passed through a first hydrogen membrane where a first hydrogen containing permeate stream is separated from a first helium containing retentate stream having about 3-30% hydrogen content by volume therein. 15. The integrated system of claim 14 , wherein the first hydrogen membrane is an unpurged membrane operating at a minimum hydrogen partial pressure pinch of 10 psia. 16. The integrated system of claim 14 , wherein a second hydrogen membrane is a purged membrane operating at lower hydrogen partial pressure on the permeate side than the first hydrogen membrane. 17. The integrated system of claim 13 , further comprising: providing four membrane stages wherein the helium-containing retentate stream is processed in the polymeric membrane system having four membrane stages with intermediate recycle and two internal compressors. 18. The integrated system of claim 13 , further comprising: introducing the helium-containing retentate stream depleted of hydrogen from step (c) into a first polymeric membrane stage, wherein the helium-containing retentate stream depleted of hydrogen is further separated into a first stage permeate stream and a first stage retentate stream. 19. The integrated system of claim 18 , further comprising: introducing the first stage retentate stream into a second polymeric membrane stage, wherein the first stage retentate stream is further separated into a second stage retentate stream which can be utilized as fuel and a second stage permeate stream which is compressed, mixed with the helium-containing retentate stream depleted of hydrogen from step (c), and recycled to the first polymeric membrane stage. 20. The integrated system of claim 19 , further comprising: introducing the first stage permeate stream into a third polymeric membrane stage where the first stage permeate stream is separated into a third stage permeate stream having about 80% or higher helium content by volume, and a third stage retentate stream, wherein the third stage retentate stream is compressed, and recycled to the first pol
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