PVD apparatus and method with deposition chamber having multiple targets and magnets
US-9708706-B2 · Jul 18, 2017 · US
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Lee Chih-Tsung patents
Lee Chih-Tsung holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Feb 10, 2015 |
| Latest publication | Jul 18, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
UV curing system for semiconductors
US-9287154-B2 · Mar 15, 2016 · US
CVD conformal vacuum/pumping guiding design
US-9234278-B2 · Jan 12, 2016 · US
Electrostatic chuck robotic system
US-8953298-B2 · Feb 10, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
PVD apparatus and method with deposition chamber having multiple targets and magnets
US-9708706-B2 · Jul 18, 2017 · US
UV curing system for semiconductors
US-9287154-B2 · Mar 15, 2016 · US
CVD conformal vacuum/pumping guiding design
US-9234278-B2 · Jan 12, 2016 · US
Electrostatic chuck robotic system
US-8953298-B2 · Feb 10, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P95/00 | 1 |
| H10P72/0436 | 1 |
| H10P72/3314 | 1 |
| H10P95/90 | 1 |
| H01L21/3105 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 2 |
| Operations & Transport | 1 |
| Cross-Sectional Technologies | 1 |