Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2020411330-A1 · Dec 31, 2020 · US
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Kokusai Electric Corp patents in 2020
Kokusai Electric Corp was listed as an assignee on 181 patent publications in 2020.
| Metric | Value |
|---|---|
| Company | Kokusai Electric Corp |
| Year | 2020 |
| Patents | 181 |
Patents
Representative publications for Kokusai Electric Corp in 2020.
Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus
US-2020407845-A1 · Dec 31, 2020 · US
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
US-2020407851-A1 · Dec 31, 2020 · US
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
US-2020411335-A1 · Dec 31, 2020 · US
Substrate processing apparatus, liquid precursor replenishment system, and method of manufacturing semiconductor device
US-10876207-B2 · Dec 29, 2020 · US
Top CPC classifications
Most common classification codes for Kokusai Electric Corp in 2020.
| CPC | Patents |
|---|---|
| H10P72/0402 | 99 |
| C23C16/52 | 76 |
| H10P14/6339 | 68 |
| H10P72/0434 | 49 |
| H01L21/0228 | 47 |
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