Lithographic apparatus and device manufacturing method
US-2016274473-A1 · Sep 22, 2016 · US
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Jansen Hans patents
Jansen Hans holds 12 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 12 |
| Recent patents | 0 |
| First publication | Jan 20, 2015 |
| Latest publication | Sep 22, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus
US-9289802-B2 · Mar 22, 2016 · US
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
US-9176371-B2 · Nov 3, 2015 · US
Lithographic apparatus and contamination removal or prevention method
US-9158206-B2 · Oct 13, 2015 · US
Lithographic apparatus and in-line cleaning apparatus
US-9036128-B2 · May 19, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Lithographic apparatus and device manufacturing method
US-2016274473-A1 · Sep 22, 2016 · US
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus
US-9289802-B2 · Mar 22, 2016 · US
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
US-9176371-B2 · Nov 3, 2015 · US
Lithographic apparatus and contamination removal or prevention method
US-9158206-B2 · Oct 13, 2015 · US
Lithographic apparatus and in-line cleaning apparatus
US-9036128-B2 · May 19, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/70341 | 12 |
| G03F7/70925 | 7 |
| G03F7/2041 | 4 |
| G03F7/70866 | 3 |
| C02F1/04 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 12 |
| Operations & Transport | 4 |
| Chemistry & Metallurgy | 2 |