Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium
US-9378943-B2 · Jun 28, 2016 · US
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Hirose Yoshiro patents
Hirose Yoshiro holds 10 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 10 |
| Recent patents | 0 |
| First publication | Apr 28, 2015 |
| Latest publication | Jun 28, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements
US-9318316-B2 · Apr 19, 2016 · US
Method of manufacturing semiconductor device
US-2016013044-A1 · Jan 14, 2016 · US
Method of manufacturing an oxynitride film for a semiconductor device
US-9196473-B2 · Nov 24, 2015 · US
Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium
US-9165761-B2 · Oct 20, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium
US-9378943-B2 · Jun 28, 2016 · US
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements
US-9318316-B2 · Apr 19, 2016 · US
Method of manufacturing semiconductor device
US-2016013044-A1 · Jan 14, 2016 · US
Method of manufacturing an oxynitride film for a semiconductor device
US-9196473-B2 · Nov 24, 2015 · US
Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium
US-9165761-B2 · Oct 20, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P14/6682 | 9 |
| H10P14/6339 | 9 |
| H01L21/0228 | 9 |
| H10P14/69433 | 6 |
| H10P14/6922 | 6 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 10 |
| Electricity | 10 |