Catadioptric projection objective including a reflective optical component and a measuring device
US-10146137-B2 · Dec 4, 2018 · US
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Gruner Toralf patents
Gruner Toralf holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 0 |
| First publication | Jun 2, 2015 |
| Latest publication | Dec 4, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Microlithographic projection exposure apparatus
US-9733395-B2 · Aug 15, 2017 · US
Method of manufacturing a projection objective and projection objective
US-9360775-B2 · Jun 7, 2016 · US
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
US-9086637-B2 · Jul 21, 2015 · US
Optical system of microlithographic projection exposure apparatus and method of correcting wavefront deformation in same
US-9081310-B2 · Jul 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Catadioptric projection objective including a reflective optical component and a measuring device
US-10146137-B2 · Dec 4, 2018 · US
Microlithographic projection exposure apparatus
US-9733395-B2 · Aug 15, 2017 · US
Method of manufacturing a projection objective and projection objective
US-9360775-B2 · Jun 7, 2016 · US
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
US-9086637-B2 · Jul 21, 2015 · US
Optical system of microlithographic projection exposure apparatus and method of correcting wavefront deformation in same
US-9081310-B2 · Jul 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/70191 | 3 |
| G03F7/70266 | 2 |
| G03F7/70891 | 2 |
| G03F7/70341 | 2 |
| G03F7/70225 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 7 |
| Cross-Sectional Technologies | 1 |