Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Bloks Ruud Hendrikus Martinus Johannes was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Bloks Ruud Hendrikus Martinus Johannes |
| Year | 2017 |
| Patents | 1 |
Representative publications for Bloks Ruud Hendrikus Martinus Johannes in 2017.
Most common classification codes for Bloks Ruud Hendrikus Martinus Johannes in 2017.
| CPC | Patents |
|---|---|
| G03F7/2041 | 1 |
| G03F7/3085 | 1 |
| G03F7/70341 | 1 |
| G03F7/70825 | 1 |
| G03F7/70875 | 1 |
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