Lithographic apparatus having a chuck with a visco-elastic damping layer
US-8928860-B2 · Jan 6, 2015 · US
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Hempenius Peter Paul patents in 2015
Hempenius Peter Paul was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Hempenius Peter Paul |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Hempenius Peter Paul in 2015.
Top CPC classifications
Most common classification codes for Hempenius Peter Paul in 2015.
| CPC | Patents |
|---|---|
| G03F7/707 | 1 |
| G03F7/70783 | 1 |
| G03F7/7095 | 1 |
| H10P72/70 | 1 |
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