Icp antenna and substrate processing device including the same
US-2019385814-A1 · Dec 19, 2019 · US
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Eugene Technology Co Ltd patents in 2019
Eugene Technology Co Ltd was listed as an assignee on 15 patent publications in 2019.
| Metric | Value |
|---|---|
| Company | Eugene Technology Co Ltd |
| Year | 2019 |
| Patents | 15 |
Patents
Representative publications for Eugene Technology Co Ltd in 2019.
Substrate processing system
US-2019341278-A1 · Nov 7, 2019 · US
Substrate treatment apparatus and substrate treatment method
US-2019316254-A1 · Oct 17, 2019 · US
Method for forming epitaxial layer at low temperature
US-2019304785-A1 · Oct 3, 2019 · US
Substrate processing apparatus
US-10392702-B2 · Aug 27, 2019 · US
Top CPC classifications
Most common classification codes for Eugene Technology Co Ltd in 2019.
| CPC | Patents |
|---|---|
| C23C16/45578 | 5 |
| H10P72/0434 | 5 |
| C23C16/4412 | 4 |
| H10P72/0402 | 4 |
| C23C16/45504 | 3 |
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