Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber
US-9478455-B1 · Oct 25, 2016 · US
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Lerner Alexander N patents in 2016
Lerner Alexander N was listed as an assignee on 4 patent publications in 2016.
| Metric | Value |
|---|---|
| Company | Lerner Alexander N |
| Year | 2016 |
| Patents | 4 |
Patents
Representative publications for Lerner Alexander N in 2016.
Transparent reflector plate for rapid thermal processing chamber
US-9449858-B2 · Sep 20, 2016 · US
Transfer arm for film frame substrate handling during plasma singulation of wafers
US-2016133519-A1 · May 12, 2016 · US
Proximity contact cover ring for plasma dicing
US-2016086852-A1 · Mar 24, 2016 · US
Top CPC classifications
Most common classification codes for Lerner Alexander N in 2016.
| CPC | Patents |
|---|---|
| H01L21/3065 | 3 |
| H01L21/6836 | 3 |
| H01L21/78 | 3 |
| H10P54/00 | 3 |
| H10P72/7402 | 3 |
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