Process chamber having separate process gas and purge gas regions
US-9870919-B2 · Jan 16, 2018 · US
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Kuppurao Satheesh patents in 2018
Kuppurao Satheesh was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Kuppurao Satheesh |
| Year | 2018 |
| Patents | 1 |
Patents
Representative publications for Kuppurao Satheesh in 2018.
Top CPC classifications
Most common classification codes for Kuppurao Satheesh in 2018.
| CPC | Patents |
|---|---|
| H01L21/0262 | 1 |
| H01L21/67017 | 1 |
| H01L21/67109 | 1 |
| H01L21/67115 | 1 |
| H10P14/24 | 1 |
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