MEMS fabrication process with two cavities operating at different pressures
US-9463976-B2 · Oct 11, 2016 · US
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Steimle Robert F patents in 2016
Steimle Robert F was listed as an assignee on 5 patent publications in 2016.
| Metric | Value |
|---|---|
| Company | Steimle Robert F |
| Year | 2016 |
| Patents | 5 |
Patents
Representative publications for Steimle Robert F in 2016.
Reducing MEMS stiction by introduction of a carbon barrier
US-9463973-B2 · Oct 11, 2016 · US
Reducing MEMS stiction by deposition of nanoclusters
US-9434602-B2 · Sep 6, 2016 · US
Methods for bonding semiconductor wafers
US-9418830-B2 · Aug 16, 2016 · US
Reducing MEMS stiction by deposition of nanoclusters
US-9290380-B2 · Mar 22, 2016 · US
Top CPC classifications
Most common classification codes for Steimle Robert F in 2016.
| CPC | Patents |
|---|---|
| B81B2201/0235 | 4 |
| B81B2203/0181 | 3 |
| B81B2201/0221 | 2 |
| B81B2203/06 | 2 |
| B81B3/0005 | 2 |
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