Optical element mount for lithographic apparatus
US-9335641-B2 · May 10, 2016 · US
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Tegenbosch Henricus Gerardus patents in 2016
Tegenbosch Henricus Gerardus was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Tegenbosch Henricus Gerardus |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Tegenbosch Henricus Gerardus in 2016.
Top CPC classifications
Most common classification codes for Tegenbosch Henricus Gerardus in 2016.
| CPC | Patents |
|---|---|
| G03F7/70175 | 1 |
| G03F7/70783 | 1 |
| G03F7/70825 | 1 |
| G03F7/70891 | 1 |
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