Graphene wiring structure and method for manufacturing graphene wiring structure

Patent metadata

Field	Value
Publication number	US-9997611-B2
Application number	US-201615390899-A
Country	US
Kind code	B2
Filing date	Dec 27, 2016
Priority date	Mar 4, 2016
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

A graphene wiring structure of an embodiment has a multilayered graphene having a plurality of planar graphene sheets laminated, and a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets.

First claim

What is claimed is:

1. A graphene wiring structure, comprising:
a multilayered graphene having a plurality of planar graphene sheets laminated;
a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets;
a substrate; and
a metal portion on the substrate,
wherein one end of each of the planar graphene sheets is connected to the metal portion.

2. The structure according to claim 1 , wherein the metal oxyhalide is at least one compound selected from the group consisting of NbOCl 3 , MoOCl 3 , TaOCl 3 , WOCl 4 , BiOCl, NbO 2 Cl, MoO 2 Cl, TaO 2 Cl, WO 2 Cl 2 , NbOF 3 , MoOF 3 , TaOF 3 , MoOF 4 , WOF 4 , BiOF, NbO 2 F, MoO 2 F, TaO 2 F, MoO 2 F 2 , and WO 2 F 2 .

3. The structure according to claim 1 , wherein the metal oxyhalide includes at least one metal selected from the group consisting of Nb, Mo, Ta, W, and Bi as a metal of the metal oxyhalide.

4. The structure according to claim 1 , wherein the substrate comprises a material having a hydrocarbon decomposition catalytic property and a carbon solid solution property.

5. The structure according to claim 1 , wherein the multilayered graphene has 10 to 100 of the planar graphene sheets, and has a thickness of from 5 nm to 50 nm.

6. The structure according to claim 1 , wherein the first interlayer substance is present between each of the plurality of planar graphene sheets.

7. The structure according to claim 1 , wherein the metal oxyhalide is at least one of a metal oxychloride and a metal oxyfluoride.

8. The structure according to claim 1 , wherein the other end of each of the planar graphene sheets is not connected to the metal portion.

9. The structure according to claim 1 , wherein the metal portion is formed of a metal or an alloy containing Fe, Ta, or Mo.

10. The structure according to claim 1 , wherein the substrate comprises aluminum oxide (Al 2 O 3 ) or titanium oxide (TiO 2 ).

11. The structure according to claim 1 , wherein an interlayer distance between the planar graphene sheets is 0.7 nm to 1.0 nm.

12. The structure according to claim 1 , wherein the planar graphene sheets are grown from the metal portion as a catalyst.

13. The structure according to claim 1 , further comprising:
a first insulating film and a second insulating film provided on the substrate such that the multilayered graphene is positioned between the first insulating film and the second insulating film.

14. The structure according to claim 13 , wherein the first insulating film has a main surface perpendicular to a surface of the substrate, and the second insulating film has a main surface perpendicular to the surface of the substrate.

15. The structure according to claim 1 , further comprising a third interlayer substance between the plurality of planar graphene sheets, wherein the third interlayer substance is an oxide of a metal contained in the metal oxyhalide.

16. The structure according to claim 15 , wherein the first interlayer substance, the second interlayer substance, and the third interlayer substance are present between each of the plurality of planar graphene sheets.

17. The structure according to claim 1 , further comprising a second interlayer substance between the plurality of planar graphene sheets, wherein the second interlayer substance is a halide of a metal contained in the metal oxyhalide.

18. The structure according to claim 17 , wherein the first interlayer substance and the second interlayer sub stance are present between each of the plurality of planar graphene sheets.

Assignees

• Toshiba Kk

Inventors

• Miyazaki Hisao
• Sakai Tadashi
• Katagiri Masayuki
• Yamazaki Yuichi

Classifications

• H10W20/4462 Primary

  Carbon or carbon-containing materials, e.g. graphene · CPC title

• H01L29/1606

  Electricity · mapped topic

• H01L29/66015 Primary

  Electricity · mapped topic

• H01L2924/13088

  Electricity · mapped topic

• H01L39/123

  Electricity · mapped topic