Centering substrates on a chuck

Patent metadata

Field	Value
Publication number	US-9997385-B2
Application number	US-201715490175-A
Country	US
Kind code	B2
Filing date	Apr 18, 2017
Priority date	Feb 19, 2014
Publication date	Jun 12, 2018
Grant date	Jun 12, 2018

Abstract

An apparatus and an associated method. The apparatus includes a chuck in a process chamber, an array of three or more ultrasonic sensors in the process chamber, a ceramic ring surrounding the chuck, and a controller connected to the ultrasonic sensors. The chuck is configured to removeably hold a substrate for processing. Each ultrasonic sensor may send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region. The controller may compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor. The method compares a measured position of the substrate on the chuck to a specified position on the chuck.

First claim

What is claimed is:

1. An apparatus, comprising:
a chuck in a process chamber, said chuck configured to removeably hold a substrate for processing;
an array of three or more ultrasonic sensors in the process chamber, each ultrasonic sensor of the three or more ultrasonic sensors configured to emit and detect ultrasonic sound waves, each ultrasonic sensor of the three or more ultrasonic sensors equally spaced from each other and arranged about a center of the chuck and positioned relative to the chuck so as to send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region of the substrate;
a ceramic ring surrounding the chuck, wherein each ultrasonic sensor of the three or more ultrasonic sensors is notched into the ceramic ring, wherein a top surface of the ceramic ring is coplanar with a top surface of the chuck wherever on the ceramic ring there is a respective ultrasonic sensor of the three or more ultrasonic sensors, and wherein the top surface of the ceramic ring is coplanar with the top surface of the substrate wherever on the ceramic ring there is no ultrasonic sensor of the three or more ultrasonic sensors; and
a controller connected to the array of three or more ultrasonic sensors and configured to compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor of the array of three or more ultrasonic sensors.

2. The apparatus of claim 1 , wherein a top surface of each ultrasonic sensor of the three or more ultrasonic sensors is coplanar with a top surface of the substrate.

3. The apparatus of claim 1 , wherein a bottom surface of each ultrasonic sensor of the three or more ultrasonic sensors is coplanar with a bottom surface of the substrate.

4. The apparatus of claim 1 , wherein the bottom surface of the substrate is in direct physical contact with the top surface of the chuck.

5. The apparatus of claim 1 , wherein the substrate has a peripheral edge, and wherein each ultrasonic sensor of the three or more ultrasonic sensors is configured to detect a respective distance of the peripheral edge of the substrate from the ultrasonic sensor.

6. The apparatus of claim 1 , wherein each ultrasonic sensor of the three or more ultrasonic sensors is positioned to detect a respective distance of a peripheral region of the top surface of the substrate from the ultrasonic sensor.

7. The apparatus of claim 1 , wherein each ultrasonic sensor of the array of three or more ultrasonic sensors is attached to the ceramic ring and positioned to detect a respective distance of a peripheral edge of the substrate from the ultrasonic sensor.

8. The apparatus of claim 1 , wherein each ultrasonic sensor of the three or more ultrasonic sensors is configured to operate in focused mode having a focal depth and a focal zone.

9. The apparatus of claim 1 , wherein the controller includes a micro-processor and a memory unit.

10. The apparatus of claim 1 , wherein the controller includes a micro-processor and a memory unit, said controller configured to compare the measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor of the array of three or more ultrasonic sensors to a calibration time for the ultrasonic sensor.

11. The apparatus of claim 10 , wherein processing of substrates is aborted if the measured elapsed time is different from the calibrated time by a specified amount of time for any ultrasonic sensor of the array of three or more ultrasonic sensors.

12. The apparatus of claim 10 , wherein the measured elapsed time is recorded in the memory unit for each substrate processed.

13. The apparatus of claim 1 , wherein the chuck is an electrostatic chuck and the chuck is configured to hold a semiconductor wafer having no machined or ground flats or notches formed on the edge of the semiconductor wafer.

14. The apparatus of claim 1 , wherein there is an array of four of the ultrasonic sensors, each ultrasonic of the four ultrasonic sensors in the process chamber, each ultrasonic sensor of the four ultrasonic sensors equally spaced apart from each other and arranged about the center of the chuck.

15. The apparatus of claim 1 , wherein the process chamber is a vacuum chamber and the apparatus is a plasma deposition or reactive ion etch apparatus.

16. A method, comprising:
providing an apparatus comprising:

a chuck in a process chamber, said chuck configured to removeably hold a substrate for processing;
an array of three or more ultrasonic sensors in the process chamber, each ultrasonic sensor of the three or more ultrasonic sensors configured to emit and detect ultrasonic sound waves, each ultrasonic sensor of the three or more ultrasonic sensors equally spaced from each other and arranged about a center of the chuck and positioned relative to the chuck so as to send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region of the substrate;
a ceramic ring surrounding the chuck, wherein each ultrasonic sensor of the three or more ultrasonic sensors is notched into the ceramic ring, wherein a top surface of the ceramic ring is coplanar with a top surface of the chuck wherever on the ceramic ring there is a respective ultrasonic sensor of the three or more ultrasonic sensors, and wherein the top surface of the ceramic ring is coplanar with the top surface of the substrate wherever on the ceramic ring there is no ultrasonic sensor of the three or more ultrasonic sensors; and
a controller connected to the array of three or more ultrasonic sensors and configured to compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor of the array of three or more ultrasonic sensors; and
placing the substrate on the chuck; and
measuring a position of the substrate on the chuck using the array of three or more ultrasonic sensors and comparing the measured position to a specified position on the chuck.

17. The method of claim 16 , wherein a top surface of each ultrasonic sensor of the three or more ultrasonic sensors is coplanar with a top surface of the substrate.

18. The method of claim 16 , wherein a bottom surface of each ultrasonic sensor of the three or more ultrasonic sensors is coplanar with a bottom surface of the substrate.

19. The method of claim 16 , wherein the bottom surface of the substrate is in direct physical contact with the top surface of the chuck.

Assignees

• IBM

Inventors

• Adderly Shawn A
• Distefano Samantha D
• Gambino Jeffrey P
• Levy Max G
• Lifson Max L
• Moon Matthew D
• Sullivan Timothy D

Classifications

• H10P72/50 Primary

  for positioning, orientation or alignment · CPC title

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• Y10T279/21

  with measuring, indicating or control means · CPC title

• Y10T29/49764

  with testing or indicating · CPC title

• G01S15/42

  Simultaneous measurement of distance and other co-ordinates (indirect measurement G01S15/46) · CPC title