Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
US-2022406552-A1 · Dec 22, 2022 · US
US9997322B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9997322-B2 |
| Application number | US-201313943137-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 16, 2013 |
| Priority date | Jan 28, 2008 |
| Publication date | Jun 12, 2018 |
| Grant date | Jun 12, 2018 |
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Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.
Opening claim text (preview).
What is claimed is: 1. An electrode assembly for a plasma generating apparatus comprising: an electrically conductive electrode body configured to provide an endpoint for an electrical arc, the electrically conductive electrode body comprising: a tubular wall having an inner surface and an outer surface; and a protrusion protruding inwardly from the tubular wall in a direction toward a longitudinal axis about which the tubular wall is centered, the protrusion including an edge extending along an intersection between at least two surfaces of the protrusion; and at least one electrically insulating member disposed at least partially within and in contact with the tubular wall of the electrode body, the at least one electrically insulating member covering at least a portion of the inner surface of the tubular wall and leaving exposed at least the edge of the interior protrusion. 2. The electrode assembly of claim 1 , wherein the electrode body comprises: a first member comprising the tubular wall; and a separately formed second member comprising the protrusion, the second member positioned within and electrically coupled to the first member. 3. The electrode assembly of claim 1 , wherein the protrusion comprises an integral portion of the tubular wall. 4. The electrode assembly of claim 1 , wherein the electrically conductive electrode body comprises a metal or metal alloy. 5. The electrode assembly of claim 1 , wherein the at least one electrically insulating member comprises a ceramic material. 6. The electrode assembly of claim 1 , wherein the at least one electrically insulating member comprises: a first electrically insulating member disposed at least partially within the tubular wall of the electrode body on a first longitudinal side of the interior protrusion of the electrode body; and a second electrically insulating member disposed at least partially within the tubular wall of the electrode body on a second longitudinal side of the interior protrusion of the electrode body. 7. The electrode assembly of claim 1 , wherein the at least one electrically insulating member further covers at least a portion of an end surface of the tubular wall configured to be positioned closest to another electrically conductive electrode body. 8. The electrode assembly of claim 1 , wherein the at least one electrically insulating member comprises at least one threaded surface coupled with a complementary threaded surface of the electrode body. 9. The electrode assembly of claim 1 , wherein the edge of the protrusion extends along an intersection between two frustoconical surfaces of the protrusion. 10. The electrode assembly of claim 1 , wherein the edge has a circular shape. 11. An electrode assembly for a plasma generating apparatus comprising: an electrically conductive electrode body comprising a generally tubular wall having an inner surface and an outer surface, and a protrusion protruding from the generally tubular wall in a generally radially inward direction, the protrusion comprising an edge extending along an intersection between at least two surfaces of the protrusion; and a structure for generating a magnetic field configured to control a location of an arc endpoint on the electrode body. 12. The electrode assembly of claim 11 , wherein the structure for generating a magnetic field comprises at least one of a coiled wire and a solid magnet encircling at least a portion of the generally tubular wall of the electrode body. 13. The electrode assembly of claim 11 , wherein the structure for generating a magnetic field is configured and positioned to generate a magnetic field configured to maintain the location of the arc endpoint substantially on the edge of the protrusion. 14. The electrode assembly of claim 13 , wherein the electrode body further comprises at least one electrically insulating member disposed at least partially within the generally tubular wall of the electrode body, the at least one electrically insulating member covering at least a portion of the inner surface of the generally tubular wall and leaving exposed at least the edge of the protrusion. 15. The electrode assembly of claim 11 , wherein the protrusion comprises an integral portion of the generally tubular wall. 16. The electrode assembly of claim 11 , wherein the edge of the protrusion extends along an intersection between two substantially frustoconical surfaces of the protrusion, the edge exhibiting a substantially circular shape. 17. A plasma generating apparatus comprising: a chamber having an inlet and an outlet; and an anode assembly and a cathode assembly configured and positioned to provide an electrical arc within the chamber and extending between an arc endpoint on a cathode of the cathode assembly and an arc endpoint on an anode of the anode assembly, at least one of the anode assembly and the cathode assembly comprising: an electrically conductive electrode body comprising a generally tubular wall having an inner surface and an outer surface, a protrusion protruding from the generally tubular wall in a generally radially inward direction, the protrusion comprising an edge extending along an intersection between at least two surfaces of the protrusion, and at least one electrically insulating member disposed at least partially within the generally tubular wall of the electrode body, the at least one electrically insulating member covering at least a portion of the inner surface of the generally tubular wall and leaving exposed at least the edge of the protrusion; and a structure for generating a magnetic field configured and positioned to control a location of an arc endpoint on the electrode body. 18. The apparatus of claim 17 , wherein the structure for generating a magnetic field comprises at least one of a coiled wire and a solid magnet encircling at least a portion of the generally tubular wall of the electrode body. 19. The apparatus of claim 17 , wherein the structure for generating a magnetic field is configured and positioned to generate a magnetic field configured to maintain the location of the arc endpoint on the edge of the protrusion. 20. The apparatus of claim 17 , wherein the protrusion comprises an integral portion of the generally tubular wall. 21. The apparatus of claim 17 , wherein the edge of the protrusion extends along an intersection between two substantially frustoconical surfaces of the protrusion, the edge exhibiting a substantially circular shape. 22. A method of generating a plasma comprising: providing a plasma generation apparatus comprising an anode and a cathode longitudinally spaced from the anode; covering at least a portion of at least one inner surface of a generally tubular wall of an electrode body of at least one of the anode and the cathode with at least one electrically insulating member to constrain a location of an arc endpoint to an exposed location on the electrode body within the generally tubular wall, comprising substantially constraining the location of the arc endpoint to an edge on a protrusion protruding from the generally tubular wall in a generally radially inward direction; introducing matter to a region between the anode and the cathode; generating a voltage between the anode and the cathode to establish an electrical arc extending therebetween; and generating at least one magnetic field in at least one area of the region between the anode and the cathode through which at least a portion of the electrical arc passes.
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