Electron generating apparatus and ionization gauge

Patent metadata

Field	Value
Publication number	US-11069503-B2
Application number	US-202017019922-A
Country	US
Kind code	B2
Filing date	Sep 14, 2020
Priority date	Sep 19, 2019
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

An electron generating apparatus includes a filament, a power supply configured to supply power to the filament so as to make the filament emit an electron, and a controller configured to repeatedly detect a value having a correlation with power supplied from the power supply to the filament, determine whether a state of the filament satisfies a notification condition, by using a plurality of detected values, and perform notification when the state satisfies the notification condition.

First claim

What is claimed is:

1. An electron generating apparatus comprising:
a filament;
a power supply configured to supply power to the filament so as to make the filament emit an electron; and
a controller configured to repeatedly detect a value having a correlation with power supplied from the power supply to the filament, determine whether a state of the filament satisfies a notification condition, by using a plurality of detected values, and perform notification when the state satisfies the notification condition.

2. The apparatus according to claim 1 , wherein when an arithmetic value obtained by arithmetically calculating the plurality of values falls outside an allowable range, the notification condition is satisfied.

3. The apparatus according to claim 2 , wherein the arithmetic value is an intermediate value of a set of the plurality of values.

4. The apparatus according to claim 3 , wherein an intermediate value of the set is a mean value of the plurality of values.

5. The apparatus according to claim 1 , wherein when an arithmetic value obtained by arithmetically calculating the plurality of values exceeds an upper limit value, the notification condition is satisfied.

6. The apparatus according to claim 1 , wherein when an arithmetic value obtained by arithmetically calculating the plurality of values falls below a lower limit value, the notification condition is satisfied.

7. The apparatus according to claim 1 , wherein a time required to detect the plurality of values from the first value to the last value is longer than a time until power supplied to the filament reaches an extreme value first after the power supply is turned on.

8. The apparatus according to claim 1 , wherein the time required to detect the plurality of values from the first value to the last value is longer than 3 sec.

9. An ionization gauge comprising an electron generating apparatus defined in claim 1 .

10. The apparatus according to claim 1 , wherein the filament has first and second terminals, and the filament heating power supply has third and fourth terminals electrically connected to the first and second terminals, respectively, so as to form a current path from the first terminal to the fourth terminal via the filament, and
wherein the controller is configured to repeatedly detect a value having a correlation with power supplied from the filament heating power supply to the filament through the entirety of the current path.

11. The apparatus according to claim 10 , wherein the power supply is a filament heating power supply, and the apparatus further comprising:
a grid;
an ion collector;
an emission current detector configured to detect a value of an emission current flowing between the filament and the grid;
a filament bias power supply configured to supply a predetermined potential to one terminal of the filament;
a heating power supply controller configured to control the voltage generated by the filament heating power supply so as to control a value of a filament current flowing through the current path based on the value of the emission current detected by the emission current detector.

12. The apparatus according to claim 11 , wherein the heating power supply controller is configured to generate a command value provided to the filament heating power supply so as to make a value of the emission current quickly reach a reference current value in an early stage in which the filament heating power supply is turned on, and
wherein the heating power supply controller is further configured to feedback-control the filament heating power supply to provide the filament heating power supply with a command value corresponding to the difference between the reference current value and the value of the emission current detected by the emission current detector so as to match the value of the emission current with the reference current value.

13. An electron generating apparatus comprising:
a filament;
a power supply configured to supply power to the filament so as to make the filament emit an electron; and
a controller configured to perform notification to prompt to replace the filament based on a value having a correlation with power supplied from the power supply to the filament,
wherein the controller does not perform the notification until a lapse of a predetermined time since the power supply is turned on.

14. The apparatus according to claim 13 , wherein the value falls outside the allowable range in part of a period until the lapse of the predetermined time since the power supply is turned on, and
the controller performs the notification in response to a case in which the value falls outside the allowable range.

15. The apparatus according to claim 13 , wherein the predetermined time is determined in accordance with a time required until the value is stabilized after the power supply is turned on.

16. An ionization gauge comprising an electron generating apparatus defined in claim 13 .

17. The apparatus according to claim 13 , wherein the filament has first and second terminals, and the filament heating power supply has third and fourth terminals electrically connected to the first and second terminals, respectively, so as to form a current path from the first terminal to the fourth terminal via the filament, and
wherein the controller is configured to repeatedly detect a value having a correlation with power supplied from the filament heating power supply to the filament through the entirety of the current path.

18. The apparatus according to claim 17 , wherein the power supply is a filament heating power supply, and the apparatus further comprising:
a grid;
an ion collector;
an emission current detector configured to detect a value of an emission current flowing between the filament and the grid;
a filament bias power supply configured to supply a predetermined potential to one terminal of the filament;
a heating power supply controller configured to control the voltage generated by the filament heating power supply so as to control a value of a filament current flowing through the current path based on the value of the emission current detected by the emission current detector.

19. The apparatus according to claim 18 , wherein the heating power supply controller is configured to generate a command value provided to the filament heating power supply so as to make a value of the emission current quickly reach a reference current value in an early stage in which the filament heating power supply is turned on, and
wherein the heating power supply controller is further configured to feedback-control the filament heating power supply to provide the filament heating power supply with a command value corresponding to the difference between the reference current value and the value of the emission current detected by the emission current detector so as to match the value of the emission current with the reference current value.

Assignees

• Canon Anelva Corp

Inventors

• Saito Noriyuki
• Iizuka Kyuma
• Chida Eriko

Classifications

• G01R19/165

  Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values · CPC title

• H01J29/487 Primary

  Replacing parts of the gun; Relative adjustment of the electrodes (H01J29/481 and H01J29/482 take precedence; vacuum locks H01J29/865) · CPC title

• H01J1/02 Primary

  Main electrodes · CPC title

• G01R27/16

  Measuring impedance of element or network through which a current is passing from another source, e.g. cable, power line · CPC title

• G01L21/30 Primary

  by making use of ionisation effects · CPC title