Ultra stable resonant cavity for gas analysis systems

Patent metadata

Field	Value
Publication number	US-9989729-B2
Application number	US-201514847977-A
Country	US
Kind code	B2
Filing date	Sep 8, 2015
Priority date	Sep 8, 2014
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

Systems and methods for detecting trace gases utilize a resonance optical cavity and a coherent light source coupled to the cavity through a cavity coupling mirror. The cavity is constructed of a material having the same or a similar coefficient of thermal expansion as the mirror elements defining the cavity. The main (bulk) cavity material may be the same as the main (bulk) material that forms the mirror elements, or it may be different. Such resonant cavity configurations provide improved accuracy and stability as compared to existing cavity configurations based upon similar principles.

First claim

What is claimed:

1. A resonant optical cavity system for detecting one or more analyte species present in a gaseous or liquid medium, comprising:
a cavity body structure made of a first material, the cavity body structure having a first end and a second end;
a first mirror element proximal to the first end of the cavity body structure;
a second mirror element proximal to the second end of the cavity body structure;
wherein the first mirror element and the second element define a cavity region therebetween, and wherein the first and second mirrors are made of a material having the same or a substantially similar coefficient of thermal expansion as the first material;
a first laser that emits laser light;
at least one optical element configured to direct the laser light of the first laser into the cavity region through the first mirror element; and
a second laser that emits laser light, wherein the laser light of the second laser is directed into the cavity region through the second mirror element by the at least one optical element.

2. The resonant optical cavity system of claim 1 , wherein the first material comprises a glass or a glass ceramic.

3. The resonant optical cavity system of claim 1 , wherein the first and second mirrors are made of the first material.

4. The resonant optical cavity system of claim 1 , wherein the first and second mirrors are made of a material different than the first material.

5. The resonant optical cavity system of claim 1 , wherein the first material comprises fused silica.

6. The resonant optical cavity system of claim 1 , further comprising a third mirror element proximal to the first or the second end, wherein the third mirror element is made of a material having the same or a substantially similar coefficient of thermal expansion as the first material.

7. The resonant optical cavity system of claim 6 , further comprising a fourth mirror element proximal to the first or the second end, wherein the fourth mirror element is made of a material having the same or a substantially similar coefficient of thermal expansion as the first material.

8. The resonant optical cavity system of claim 7 , wherein the third and fourth mirrors are high-reflectivity mirrors, each having a reflectivity of about 99% or greater on a surface facing an inside of the optical cavity body structure.

9. The resonant optical cavity system of claim 1 , wherein the first and second mirrors are high-reflectivity mirrors, each having a reflectivity of about 99% or greater on a surface facing an inside of the optical cavity body structure.

10. The resonant optical cavity system of claim 1 , wherein the first and second mirrors are high-reflectivity mirrors, each having a reflectivity of about 99.9% or greater on a surface facing an inside of the optical cavity body structure.

Assignees

• Li Cor Inc

Inventors

• Koulikov Serguei

Classifications

• G02B7/181 Primary

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title

• G01N21/39

  using tunable lasers · CPC title

• H01S3/0071

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• G01N21/031

  Multipass arrangements · CPC title

• G02B17/004

  Systems comprising a plurality of reflections between two or more surfaces, e.g. cells, resonators (multipass arrangements for optical cuvettes G01N21/031; laser resonators H01S3/05) · CPC title