Highly homogeneous glass-ceramic component

Patent metadata

Field	Value
Publication number	US-2016355433-A1
Application number	US-201615243078-A
Country	US
Kind code	A1
Filing date	Aug 22, 2016
Priority date	Feb 21, 2014
Publication date	Dec 8, 2016
Grant date	—

Abstract

A glass-ceramic component is provided that has a low average coefficient of thermal expansion (CTE) and a high CTE homogeneity. The use of such a component and a process for producing such a component are also provided.

First claim

What is claimed is:

1 . A low thermal expansion glass-ceramic component, comprising, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

2 . The glass-ceramic component according to claim 1 , wherein the interval is 0±10 ppb/K.

3 . The glass-ceramic component according to claim 1 , whereas the application temperature lies within in a range of −60° to 100° C.

4 . The glass-ceramic component according to claim 1 , whereas the application temperature is selected from the group consisting of 22° C., 30° C., 40° C., 60° C., 80° C., and 100° C.

5 . The glass-ceramic component according to claim 1 , further comprising a temperature interval that satisfies a CTE tolerance of 0±10 ppb/K has at least an extent of 10 K.

6 . The glass-ceramic component according to claim 1 , wherein the component has a rectangular base with edge lengths of, in each case, at least 100 mm and a thickness of at least 5 mm.

7 . The glass-ceramic component according to claim 1 , wherein the component has a mass of at least 500 kg.

8 . The glass-ceramic component according to claim 1 , wherein the component has a rectangular shape with at least one surface having a surface area of at least 1 m 2 .

9 . The glass-ceramic component according to claim 1 , wherein the component comprises an LAS glass-ceramic with the following composition (in % by weight based on oxide):

SiO 2
50-70,

Al 2 O 3
17-32,

P 2 O 5
 3-12,

Li 2 O
2-5,

Na 2 O
0-2,

K 2 O
0-2,

MgO
0-2,

CaO
0-4,

BaO
0-5,

SrO
0-2,

ZnO
0-4,

TiO 2
1-5, and

ZrO 2
0-5.

10 . The glass-ceramic component according to claim 1 , wherein the component comprises a glass-ceramic with an OH content of at least 0.06 mol/l.

11 . The glass-ceramic component according to claim 1 , wherein the component is a component for use in a field selected from the group consisting of astronomy, metrology, LCD lithography, microlithography, and precision measurement technology.

12 . A process for producing the glass-ceramic component according to claim 1 , comprising the steps of:
melting of a green body; casting of the green body; and ceramization of the green body to form a glass-ceramic.

13 . An astronomical mirror comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

14 . An extreme ultraviolet lithography device comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

15 . The device according to claim 14 , wherein the extreme ultraviolet lithography device is a mask or a mirror.

Assignees

• Schott Ag

Inventors

• Jedamzik Ralf
• Grün Steffan
• Lifka Thomas
• Faderl Johann

Classifications

• G03F1/22

  Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof · CPC title

• C03C10/0027 Primary

  containing SiO2, Al2O3, Li2O as main constituents · CPC title

• C03C3/097

  containing phosphorus, niobium or tantalum · CPC title

• C03C2204/00

  Glasses, glazes or enamels with special properties · CPC title

• C03B32/02

  Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles {(C03B27/012 takes precedence)} · CPC title