Field-effect sensor and associated methods

Patent metadata

Field	Value
Publication number	US-9989488-B2
Application number	US-201515116056-A
Country	US
Kind code	B2
Filing date	Feb 9, 2015
Priority date	Feb 17, 2014
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

An apparatus comprising: a first layer ( 512 ) configured to enable a flow of charge carriers from a source electrode ( 505 ) to a drain electrode ( 506 ); a second layer ( 513 ) configured to generate a voltage in response to a physical stimulus, the second layer ( 513 ) positioned so that the generated voltage can affect the conductance of the first layer ( 512 ); and a third layer ( 514 ) positioned between the first ( 512 ) and second ( 513 ) layers to prevent a flow of charge carriers therebetween. The third layer ( 514 ) comprises a material configured to form electric double-layers ( 516, 517 ) at the interfaces with the first ( 512 ) and second ( 513 ) layers in response to the generated voltage. The formation of the electric double-layers ( 516, 517 ) enhances the effect of the generated voltage on the conductance of the first layer ( 512 ) such that determination of the conductance of the first layer ( 512 ) can be used to allow the magnitude of the physical stimulus to be derived.

First claim

The invention claimed is:

1. An apparatus comprising:
a first layer configured to enable a flow of charge carriers from a source electrode to a drain electrode;
a second layer configured to generate a voltage in response to a physical stimulus which is proportional to the magnitude of the physical stimulus, the second layer positioned such that the generated voltage can affect a conductance of the first layer; and
a third layer positioned between the first and second layers to prevent a flow of charge carriers therebetween,
wherein the third layer comprises a material configured to form electric double-layers at the interfaces with the first and second layers in response to the generated voltage, formation of the electric double-layers enhancing an effect of the generated voltage on the conductance of the first layer such that determination of the conductance of the first layer can be used to allow a presence, magnitude, or any combination thereof of the physical stimulus to be derived, wherein the physical stimulus comprises a chemical or biological species, and the second layer is configured to generate a voltage which is proportional to an amount of chemical or biological species to which the second layer is exposed, and wherein the chemical or biological species is water, and the second layer comprises a junction of graphene oxide and reduced graphene oxide.

2. The apparatus of claim 1 , wherein the second layer comprises a junction of first and second materials each having one or more functional groups configured to release charged particles on interaction with the chemical or biological species, and wherein the first material has a higher concentration of charge-releasing functional groups than the second material such that a concentration gradient of charged particles is produced at the junction on exposure to the chemical or biological species to generate the voltage.

3. The apparatus of claim 1 , wherein the physical stimulus comprises heat, and the second layer comprises a pyroelectric material configured to generate a voltage which is proportional to the temperature of the pyroelectric material.

4. The apparatus of claim 1 , wherein the physical stimulus comprises electromagnetic radiation, and the second layer comprises a photovoltaic cell configured to generate a voltage which is proportional to the intensity of electromagnetic radiation incident upon the photovoltaic cell.

5. The apparatus of claim 1 , wherein the physical stimulus comprises mechanical stress, and the second layer comprises a piezoelectric material configured to generate a voltage which is proportional to the magnitude of stress applied to the piezoelectric material.

6. The apparatus of claim 1 , wherein the physical stimulus comprises an electric field, and the second layer comprises a ferroelectric material configured to generate a voltage which is proportional to a strength of electric field to which the ferroelectric material is exposed.

7. The apparatus of claim 1 , wherein the apparatus has a substantially planar configuration in which the second layer is adjacent to the first layer, or has a stacked configuration in which the second layer overlies the first layer.

8. The apparatus of claim 1 , wherein the first layer has a thickness of one atomic layer.

9. The apparatus of claim 1 , wherein the first layer is patterned to form a channel between the source and drain electrodes.

10. The apparatus of claim 1 , wherein the material of the third layer comprises one or more of a liquid and a gel.

11. The apparatus of claim 1 , wherein the apparatus comprises a gate electrode positioned between the second and third layers.

12. The apparatus of claim 1 , wherein the apparatus comprises a protective layer configured to prevent damage to at least the second layer without preventing exposure of the second layer to the physical stimulus.

13. The apparatus of claim 1 , wherein the apparatus comprises the source and drain electrodes.

14. The apparatus of claim 1 , wherein the physical stimulus comprises water, and wherein determination of the conductance of the first layer can be used to provide an indication of a relative humidity of an environment in which the apparatus is located.

15. The apparatus of claim 1 , wherein the apparatus comprises means for determining the conductance of the first layer, and means for deriving the magnitude of the physical stimulus using a determination of the conductance of the first layer.

16. The apparatus of claim 1 , wherein the apparatus is one or more of an electronic device, a portable electronic device, a portable telecommunications device, a sensor and a module for any of the aforementioned devices.

17. A method, comprising:
enabling a flow of charge carriers in a first layer from a source electrode to a drain electrode;
generating voltage in a second layer in response to a physical stimulus which is proportional to a magnitude of the physical stimulus, the second layer positioned such that the generated voltage can affect a conductance of the first layer; and
preventing a flow of charge carriers in a third layer positioned between the first and second layers,

wherein the third layer comprises a material configured to form electric double-layers at the interfaces with the first and second layers in response to the generated voltage, formation of the electric double-layers enhancing an effect of the generated voltage on the conductance of the first layer such that determination of the conductance of the first layer can be used to allow a presence, magnitude, or any combination thereof of the physical stimulus to be derived, wherein the physical stimulus comprises a chemical or biological species, and the second layer is configured to generate a voltage which is proportional to an amount of chemical or biological species to which the second layer is exposed, and wherein the chemical or biological species is water, and the second layer comprises a junction of graphene oxide and reduced graphene oxide;
determining the conductance of the first layer; and

deriving the presence and/or magnitude of the physical stimulus using the determined conductance of the first layer.

18. A non-transitory computer readable medium comprising code that, when executed by a processing device, cause the processing device to perform:
enabling a flow of charge carriers in a first layer from a source electrode to a drain electrode;
generating voltage in a second layer in response to a physical stimulus which is proportional to a magnitude of the physical stimulus, the second layer positioned such that the generated voltage can affect a conductance of the first layer; and
preventing a flow of charge carriers in a third layer positioned between the first and second layers,

wherein the third layer comprises a material configured to form electric double-layers at the interfaces with the first and second layers in response to the generated voltage, formation of the electric double-layers enhancing an effect of the generated voltage on the conductance of the first layer such that determination of the conductance of the first layer can be used to allow a presence, magnitude, or any combination thereof of the physical stimulus to be derived, wherein the physical stimulus comprises a chemical or biological species, and the second layer is configured to generate a voltage which is proportional to an amount of chemical or biological species to which the second layer is exposed, and wherein the chemical or biological species is water, and the second layer compris

Assignees

• Nokia Technologies Oy

Inventors

• Borini Stefano
• White Richard

Classifications

• G01N27/4146 Primary

  involving nanosized elements, e.g. nanotubes, nanowires · CPC title

• G01N27/4148

  Integrated circuits therefor, e.g. fabricated by CMOS processing · CPC title

• G01N27/4141

  specially adapted for gases · CPC title

• G01N27/414 Primary

  Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS · CPC title

• H10D62/882

  Graphene · CPC title