Metal gates for semiconductor devices and method thereof
US-2024429281-A1 · Dec 26, 2024 · US
US9318591B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9318591-B2 |
| Application number | US-201214006158-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 22, 2012 |
| Priority date | Mar 22, 2011 |
| Publication date | Apr 19, 2016 |
| Grant date | Apr 19, 2016 |
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This application relates to graphene based heterostructures and transistor devices comprising graphene. The hetero-structures comprise i) a first graphene layer; ii) a spacer layer and iii) a third graphene. The transistors comprise (i) an electrode, the electrode comprising a graphene layer, and (ii) an insulating barrier layer.
Opening claim text (preview).
The invention claimed is: 1. A graphene heterostructure having: a first graphene layer, shaped to form a first structure comprising at least one contact region; a second graphene layer, shaped to form a second structure comprising at least one contact region; and a spacer positioned between the first graphene layer and the second graphene layer, wherein the spacer has a thickness in the range 3 to 8 layers of one or more materials; wherein the graphene heterostructure includes two or more contacts, including a source contact and a drain contact; and wherein the source contact is positioned on at least one of the contact regions of the first structure; and wherein the drain contact is positioned on at least one of the contact regions of the second structure. 2. The graphene heterostructure according to claim 1 , wherein the spacer includes hexagonal boron-nitride. 3. The graphene heterostructure according to claim 1 , wherein the spacer lies directly next to the first graphene layer, and the second graphene layer lies directly next to the spacer. 4. The graphene heterostructure according to claim 1 , wherein the spacer has a thickness of 10 nm or less. 5. The graphene heterostructure according to claim 4 , wherein the spacer has a thickness in the range 2 nm to 4 nm. 6. The graphene heterostructure according to claim 1 , wherein the first graphene layer is a single sheet of graphene, and the second graphene layer is a single sheet of graphene. 7. The graphene heterostructure according to claim 1 , wherein the graphene heterostructure includes a base layer on which the first graphene layer is positioned. 8. The graphene heterostructure according to claim 7 , wherein the base layer includes hexagonal boron-nitride. 9. The graphene heterostructure according to claim 7 , wherein the graphene heterostructure includes a substrate on which the base layer is positioned. 10. A transistor comprising: a source electrode; a drain electrode; and an insulating barrier in contact with and situated between both the source electrode and the drain electrode, the insulating barrier comprising from 3 to 8 layers of one or more materials; wherein at least one of the source electrode and the drain electrode comprises a layer of graphene and the other electrode comprises a layer of a conductive material. 11. The graphene heterostructure according to claim 1 , wherein the graphene heterostructure is comprised in a transistor. 12. The transistor of claim 10 , wherein the transistor is a quantum tunnelling transistor. 13. A transistor comprising: a source electrode; a drain electrode; and an insulating barrier in contact with and situated between both the source electrode and the drain electrode; wherein the thickness of the insulating barrier layer is selected to provide a quantum tunnelling electron transport between the source electrode and the drain electrode; and wherein at least one of the source electrode and the drain electrode comprises a layer of graphene and the other electrode comprises a layer of a conductive material. 14. A graphene heterostructure having: a first graphene layer, shaped to form a first structure comprising at least one contact region; a second graphene layer, shaped to form a second structure comprising at least one contact region; and a spacer positioned between the first graphene layer and the second graphene layer, wherein the spacer has a thickness in the range 1 to 30 layers of one or more materials; wherein the graphene heterostructure includes two or more contacts, including a source contact and a drain contact; and wherein the source contact is positioned on at least one of the contact regions of the first structure; and wherein the drain contact is positioned on at least one of the contact regions of the second structure.
Formation of materials, e.g. in the shape of layers or pillars · CPC title
having one-dimensional [1D] charge carrier gas channels, e.g. quantum wire FETs or transistors having 1D quantum-confined channels · CPC title
having two-dimensional [2D] charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT] · CPC title
characterised by the insulator, e.g. by the gate insulator · CPC title
Nitride Group III-V materials, e.g. AlN or GaN · CPC title
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