Polishing system with pad carrier and conditioning station

Patent metadata

Field	Value
Publication number	US-9987724-B2
Application number	US-201514800115-A
Country	US
Kind code	B2
Filing date	Jul 15, 2015
Priority date	Jul 18, 2014
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

A polishing system includes a support to hold a substrate having a substrate surface to be polished, a conditioning system for conditioning a polishing pad, the conditioning system comprising one or more conditioning heads, a movable support structure, and a carrier to hold a polishing pad. The carrier is suspended from the movable support structure, and the support structure is configured to move the carrier between the support to hold the substrate and the conditioning system.

First claim

What is claimed is:

1. A polishing system, comprising:
a support to hold a substrate having a substrate surface to be polished;
a carrier to hold a polishing pad; and
a conditioning system for conditioning the polishing pad, the conditioning system comprising a conditioning head stored within a chamber in the support in a portion of the support covered by the substrate when the substrate is held on the support and configured to be raised out of the support to contact the polishing pad when the substrate is not held on the support.

2. The polishing system of claim 1 , comprising a pad rinsing system to supply a cleaning fluid to the polishing pad.

3. The polishing system of claim 2 , wherein the pad rinsing system is stored within a chamber in the support and is configured to be raised out of the support to direct the cleaning fluid onto the polishing pad when the substrate is not held on the support.

4. A polishing system, comprising:
a support to hold a substrate having a substrate surface to be polished;
a carrier to hold a polishing pad, the carrier suspended from a movable support structure, wherein the support structure is configured to move the carrier with the polishing pad between the support to hold the substrate and a conditioning system; and
a pad rinsing system to supply a cleaning fluid to the polishing pad, the pad rinsing system stored within a chamber in the support in a portion of the support covered by the substrate when the substrate is held on the support and configured to be raised out of the support to apply cleaning fluid to the polishing pad when the substrate is not held on the support.

Assignees

• Applied Materials Inc

Inventors

• Gurusamy Jay
• Chen Hung Chih

Classifications

• B24B53/005

  Positioning devices for conditioning tools · CPC title

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B37/34

  Accessories · CPC title

• B24B27/0023

  grinding machines with a plurality of working posts · CPC title

• B24B27/0076

  grinding machines comprising two or more grinding tools · CPC title