Methane sensor
US-2024319129-A1 · Sep 26, 2024 · US
US9983164B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9983164-B1 |
| Application number | US-201514863251-A |
| Country | US |
| Kind code | B1 |
| Filing date | Sep 23, 2015 |
| Priority date | Mar 18, 2015 |
| Publication date | May 29, 2018 |
| Grant date | May 29, 2018 |
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An electrochemical sensor assembly is disclosed. In some implementations, the electrochemical sensor assembly comprises at least one electrochemical sensor/cell including a substrate with a cavity formed on a first side of the substrate, an ionic conductor is disposed within the cavity, and a lid assembly positioned over the cavity. The lid assembly may include a plurality of electrodes and a gas permeable region positioned over the plurality of electrodes, where the plurality of electrodes include a working electrode configured to react a molecular species when the molecular species is received through the gas permeable region. The lid assembly may be sealed to the substrate with a bonding layer disposed between the lid assembly and the substrate. The bonding layer may be curable with light or thermally curable at a suitably low temperature to avoid thermal damage to the ionic conductor.
Opening claim text (preview).
What is claimed is: 1. An electrochemical sensor assembly, comprising: a ceramic substrate with a plurality of cavities and electrical connections formed on a first side of the ceramic substrate; one or more electrolyte solutions disposed within the plurality of cavities; a lid assembly positioned over the plurality of cavities, the lid assembly including a plurality of electrodes and one or more gas permeable regions positioned over the plurality of electrodes, the plurality of electrodes including a plurality of working electrodes configured to react respective molecular species when a molecular species is received by a respective one of the plurality of working electrodes through the one or more gas permeable regions, wherein said reaction produces ions mobile in the ionic conductor between two or more of the plurality of electrodes; a low temperature or light cured bonding layer between the lid assembly and the ceramic substrate, wherein the ceramic substrate and the lid assembly comprises a liquid sealed ceramic package; and control circuitry connected to one or more of the plurality of electrodes via the electrical connections going through the ceramic substrate. 2. The electrochemical sensor assembly of claim 1 , further comprising an electrically conductive layer configured to connect the plurality of electrodes to the electrical connections going through the ceramic substrate. 3. The electrochemical sensor assembly of claim 2 , wherein the electrically conductive layer comprises the low temperature or light cured bonding layer. 4. The electrochemical sensor assembly of claim 3 , wherein the low temperature or light cured bonding layer comprises an anisotropic conductive paste or film. 5. The electrochemical sensor assembly of claim 2 , wherein the plurality of working electrodes include a first working electrode configured to react with a first molecular species and a second working electrode configured to react with a second molecular species different from the first molecular species, the first working electrode is associated with a first cavity of the plurality of cavities and the second working electrode is associated with a second cavity of the plurality of cavities, and the lid assembly includes a monolithic panel with a first gas permeable region positioned over the first working electrode and a second gas permeable region positioned over the second working electrode. 6. The electrochemical sensor assembly of claim 5 , wherein the first cavity is filled with a first electrolyte solution and the second cavity is filled with a second electrolyte solution different from the first electrolyte solution. 7. The electrochemical sensor assembly of claim 5 , wherein the bonding layer is configured to seal the first cavity from the second cavity. 8. A method of assembling an electrochemical sensor, comprising: providing a ceramic substrate with a plurality of cavities and electrical connections formed on a first side of the ceramic substrate; depositing one or more electrolyte solutions within the plurality of cavities; positioning a lid assembly over the plurality of cavities, the lid assembly including a plurality of electrodes and one or more gas permeable regions positioned over the plurality of electrodes, the plurality of electrodes including a plurality of working electrodes configured to react respective molecular species when a molecular species is received by a respective one of the plurality of working electrodes through the one or more gas permeable regions, wherein said reaction produces ions mobile in the ionic conductor between two or more of the plurality of electrodes; adhering the lid assembly to the ceramic substrate with a low temperature or light cured bonding layer between the lid assembly and the ceramic substrate; and connecting control circuitry to one or more of the plurality of electrodes via the electrical connections going through the ceramic substrate. 9. The method of claim 8 , wherein the plurality of electrodes are electrically connected to the electrical connections going through the ceramic substrate by the low temperature or light cured bonding layer. 10. The method of claim 8 , further comprising: connecting the control circuitry to a second side of the ceramic substrate, wherein the first side comprises an upper side of the ceramic substrate, the second side comprises a lower side of the ceramic substrate, and the control circuitry is positioned below the second side of the ceramic substrate.
for gases other than oxygen · CPC title
Concentration cells using liquid electrolytes {measuring currents or voltages in voltaic cells} · CPC title
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