Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US9982920B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9982920-B2 |
| Application number | US-201415029824-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 14, 2014 |
| Priority date | Oct 17, 2013 |
| Publication date | May 29, 2018 |
| Grant date | May 29, 2018 |
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A method of operating a heat transfer system includes starting operation of a first heat transfer fluid vapor/compression circulation loop including a fluid pumping mechanism, a heat exchanger for rejecting thermal energy from a first heat transfer fluid, and a heat absorption side of an internal heat exchanger. A first conduit in a closed fluid circulation loop circulates the first heat transfer fluid therethrough. Operation of a second two-phase heat transfer fluid circulation loop is started after starting operation of the first heat transfer fluid circulation loop. The second heat transfer fluid circulation loop transfers heat to the first heat transfer fluid circulation loop through the internal heat exchanger and includes a heat rejection side of the internal heat exchanger, a liquid pump, and a heat exchanger evaporator. A second conduit in a closed fluid circulation loop circulates a second heat transfer fluid therethrough.
Opening claim text (preview).
The invention claimed is: 1. A method of operating a heat transfer system comprising: starting operation of a first heat transfer fluid circulation loop including: a fluid pumping mechanism; a condenser for rejecting thermal energy from a first heat transfer fluid; a condenser fan to urge an airflow across the condenser; an expansion valve; and an intermediate heat exchanger for absorbing thermal energy into the first heat transfer fluid; wherein a first conduit in a closed fluid circulation loop circulates the first heat transfer fluid therethrough; wherein starting operation of the first heat transfer fluid circulation loop includes: opening of the expansion valve; starting operation of the condenser fan after opening of the expansion valve; and starting operation of the fluid pumping mechanism after starting operation of the condenser fan; and starting operation of a second two-phase heat transfer fluid circulation loop after starting operation of the first heat transfer fluid circulation loop, the second heat transfer fluid circulation loop in thermal connection with the first heat transfer circulation loop at the intermediate heat exchanger and including: a liquid pump to urge a second heat transfer fluid through the second heat transfer circulation loop; and an evaporator; wherein a second conduit in a closed fluid circulation loop circulates the second heat transfer fluid therethrough, and is configured to exchange thermal energy between the first heat transfer fluid and the second heat transfer fluid at the intermediate heat exchanger; and wherein operation of the liquid pump is started after operation of the fluid pumping mechanism. 2. The method of claim 1 , wherein the fluid pumping mechanism is a compressor. 3. The method of claim 1 , further comprising flowing first heat transfer fluid through the intermediate heat exchanger prior to starting operation of the second two-phase heat transfer fluid circulation loop. 4. The method of claim 3 , wherein flowing first heat transfer fluid through the intermediate heat exchanger via the first conduit is driven by startup of the fluid pumping mechanism. 5. The method of claim 1 , further comprising starting an evaporator fan after starting the liquid pump. 6. The method of claim 1 , wherein a time delay between starting operation of the first heat transfer fluid circulation loop and starting operation of the second heat transfer fluid circulation loop is between 0.1 second and 10 minutes. 7. The method of claim 6 , wherein the time delay is between 0.1 second and 5 minutes. 8. The method of claim 7 , wherein the time delay is between 0.1 second and 1 minute. 9. The method of claim 1 , wherein the first heat transfer fluid circulation loop is disposed entirely outdoors. 10. The method of claim 1 , wherein the second heat transfer fluid circulation loop is disposed at least partially indoors. 11. The method of claim 1 , wherein the second heat transfer fluid has an ASHRAE Class A toxicity rating and an ASHRAE Class 1 or 2L flammability rating. 12. The method of claim 1 , wherein the first heat transfer fluid comprises propane, propene, isobutane, R32, R152a, ammonia, an R1234 isomer, or R410A, or a mixture of any of the above. 13. The method of claim 1 , wherein the second heat transfer fluid comprises sub-critical fluid CO 2 . 14. The method of claim 1 , wherein the second heat transfer fluid comprises at least 50% liquid.
characterised by the startup of the refrigeration cycle · CPC title
the refrigerant being carbon dioxide · CPC title
characterised by the stop of the refrigeration cycle · CPC title
using primary and secondary systems · CPC title
Fluid-circulation arrangements · CPC title
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