Wafer producing method

Patent metadata

Field	Value
Publication number	US-9981339-B2
Application number	US-201615173227-A
Country	US
Kind code	B2
Filing date	Jun 3, 2016
Priority date	Jun 5, 2015
Publication date	May 29, 2018
Grant date	May 29, 2018

Abstract

A wafer having an off angle α is produced from a hexagonal single crystal ingot having an upper surface, a c-plane exposed to the upper surface, and a c-axis perpendicular to the c-plane. The ingot is supported by a wedge member having a wedge angle α equal to the off angle α, thereby inclining the upper surface of the ingot by the off angle α with respect to a horizontal plane. A modified layer is formed by setting the focal point of a laser beam inside the ingot and next applying it to the upper surface, thereby linearly forming a modified layer inside the ingot and cracks extending from the modified layer along the c-plane. The focal point is moved in the second direction to index the focal point by a predetermined amount.

First claim

What is claimed is:

1. A wafer producing method for producing a wafer having an off angle α from a hexagonal single crystal ingot having an upper surface, a c-plane exposed to the upper surface, and a c-axis perpendicular to the c-plane, the wafer producing method comprising:
a supporting step of supporting the ingot through a wedge member having a wedge angle α to a support table having a horizontal supporting surface, the wedge angle α being equal to the off angle α, thereby inclining the upper surface of the ingot by the off angle α with respect to a horizontal plane;
a first modified layer forming step of setting a focal point of a laser beam having a transmission wavelength to the ingot inside the ingot at a fixed vertical position and next applying the laser beam to the upper surface as relatively moving the focal point and the ingot in a first direction perpendicular to a second direction where the off angle α is formed, thereby linearly forming a first modified layer inside the ingot and first cracks extending from the first modified layer along the c-plane;
a first indexing step of relatively moving the focal point in the second direction to index the focal point by a predetermined amount; and
an initial wafer producing step of separating an initial wafer from the ingot at a separation plane containing the first modified layers and the first cracks formed inside the ingot by repeating the first modified layer forming step and the first indexing step;
wherein in the first indexing step, an index amount L as a spacing between any adjacent ones of the plural first modified layers is set less than or equal to a spacing defined when front ends of the adjacent first cracks extending from the adjacent first modified layers along the c-plane overlap each other.

2. The wafer producing method according to claim 1 , further comprising:
a separation start point forming step of setting the focal point of the laser beam having a transmission wavelength to the ingot inside the ingot at a predetermined depth from a new upper surface of the ingot as a newly exposed surface obtained by separating the initial wafer in the initial wafer producing step, which depth corresponds to a thickness of the wafer to be produced, and next applying the laser beam to the new upper surface as relatively moving the focal point and the ingot to thereby form a second modified layer parallel to the new upper surface and second cracks extending from the second modified layer along the c-plane, thus forming a separation start point; and
a wafer separating step of separating a plate-shaped member having a thickness corresponding to the thickness of the wafer to be produced, from the ingot at the separation start point after performing the separation start point forming step, thus producing the wafer from the ingot;
the separation start point forming step including
a second modified layer forming step of relatively moving the focal point of the laser beam in the first direction perpendicular to the second direction, thereby linearly forming the second modified layer extending in the first direction, and
a second indexing step of relatively moving the focal point in the second direction to thereby index the focal point by the predetermined amount.

3. The wafer producing method according to claim 2 , further comprising:
a flattening step of grinding the new upper surface of the ingot to which the first modified layers and the first cracks are exposed, after performing the initial wafer producing step and before performing the separation start point forming step, thereby flattening the new upper surface of the ingot.

4. The wafer producing method according to claim 1 , wherein the hexagonal single crystal ingot is selected from a SiC single crystal ingot and a GaN single crystal ingot.

Assignees

• Disco Corp

Inventors

• Hirata Kazuya

Classifications

• B28D5/04

  by tools other than rotary type, e.g. reciprocating tools {(B28D5/0005 takes precedence)} · CPC title

• B28D5/0082 Primary

  for supporting, holding, feeding, conveying or discharging work · CPC title

• B23K26/0006 Primary

  taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence) · CPC title

• B23K2103/56

  being semiconducting · CPC title

• C30B29/406

  Gallium nitride · CPC title