Test device for testing plurality of samples and operating method thereof

Patent metadata

Field	Value
Publication number	US-9977071-B2
Application number	US-201414302354-A
Country	US
Kind code	B2
Filing date	Jun 11, 2014
Priority date	Dec 23, 2013
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

A test device includes: a testing unit connected with a measurement line, and configured to apply bias to the measurement line and measure the measurement line; a plurality of switching units configured to electrically connect the measurement line and the plurality of samples; and a control unit configured to sequentially turn on the plurality of switching units to sequentially apply the bias to the plurality of samples. The control unit determines whether a corresponding device sample has a defect based on a first measurement value according to measurement by the testing unit when the bias is applied to each of the plurality of samples.

First claim

What is claimed is:

1. A test device for testing a plurality of samples, comprising:
a testing unit connected with a measurement line, and configured to apply bias to the measurement line and measure the measurement line;
a plurality of switching units configured to electrically connect the plurality of samples, respectively, with the measurement line; and
a control unit configured to sequentially apply the bias to the plurality of samples by sequentially turning on the plurality of switching units,
wherein when the bias is applied to each of the plurality of samples, the control unit determines whether a corresponding device sample has a defect based on a first measurement value according to measurement by the testing unit.

2. The test device of claim 1 , wherein the control unit controls the plurality of switching units so that second samples, except for one or more first device samples determined to have the defect among the plurality of samples, are biased by the testing unit.

3. The test device of claim 2 , wherein the control unit sequentially biases the second samples by sequentially turning on switching units corresponding to the second samples after the second samples are biased.

4. The test device of claim 3 , wherein the control unit determines whether a corresponding device sample has a defect based on a second measurement value according to measurement by the testing unit when each of the plurality of samples is biased.

5. The test device of claim 1 , wherein the control unit commonly biases the plurality of samples by turning on the plurality of switching units, and then sequentially turns on the plurality of switching units.

6. The test device of claim 5 , wherein the control unit receives a second measurement value according to the measurement by the testing unit when the plurality of samples is commonly biased, and sequentially turns on the plurality of switching units according to the second measurement value.

7. The test device of claim 6 , wherein the control unit compares the second measurement value with a reference value, and sequentially turns on the plurality of switching units according to a result of the comparison.

8. The test device of claim 5 , wherein the control unit biases the plurality of samples by turning on the plurality of switching units for a specific time, and then sequentially turns on the plurality of switching units after elapse of the specific time.

9. The test device of claim 1 , further comprising:
a measurement device configured to measure a bias value applied to a corresponding sample through one among the plurality of switching units,
wherein the control unit compares a measurement value of the measurement device with a bias value applied by the testing unit, and controls the testing unit so as to adjust the bias value applied by the testing unit according to a result of the comparison.

Assignees

• Lee Jong Min
• Ju Chull Won
• Min Byoung Gue
• Electronics & Telecommunications Res Inst

Inventors

• Lee Jong Min
• Ju Chull Won
• Min Byoung Gue

Classifications

• G01R31/2608

  for testing bipolar transistors · CPC title

• G01R31/2621 Primary

  for testing field effect transistors, i.e. FET's · CPC title

• G01R31/26 Primary

  Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00}) · CPC title