Method for producing semiconducting indium oxide layers, indium oxide layers produced according to said method and their use
US-9194046-B2 · Nov 24, 2015 · US
US9975908B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9975908-B2 |
| Application number | US-201414900890-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2014 |
| Priority date | Jun 25, 2013 |
| Publication date | May 22, 2018 |
| Grant date | May 22, 2018 |
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The present invention relates to metal oxide precursors comprising i) at least one metal atom selected from the group consisting of In, Ga, Zn and Sn, ii) at least one non-photocrosslinkable ligand and iii) at least one photocrosslinkable ligand, to liquid coating compositions comprising the precursors, and to their use.
Opening claim text (preview).
The invention claimed is: 1. A liquid coating composition, comprising at least one metal oxide precursor, which is a coordination complex comprising: i) at least one metal atom selected from the group consisting of In, Ga, Zn and Sn; ii) at least one non-photocrosslinkable ligand; and iii) at least one photocrosslinkable ligand wherein the at least one photocrosslinkable ligand is selected from the group consisting of an acrylate, a methacrylate and an allyl; at least one solvent; and at least one photoinitiator. 2. The liquid coating composition according to claim 1 , wherein the at least one non-photocrosslinkable ligand is selected from the group consisting of an oxo radical, a hydroxyl radical, an alkoxy radical, a nitrate radical and a halide radical. 3. The liquid coating composition according to claim 2 , comprising, as at least one non-photocrosslinkable ligand, at least one oxo radical and at least one alkoxy radical. 4. The liquid coating composition according to claim 1 , comprising, as the at least one non-photocrosslinkable ligand, an oxo, an alkoxy and at least one selected from the group consisting of a nitrate and a halide. 5. The liquid coating composition according to claim 1 , wherein the at least one metal atom is In. 6. A metal oxide precursor having formula: [In 6 (μ 6 -O)(μ 2 -OR) 12-x Cl 6 (R′) x ] 2− wherein: R represents a C 1-10 alkyl, R′ represents acrylate or methacrylate, and x represents 1-10. 7. A metal oxide precursor having formula: [In 6 (μ 6 -O)(μ 2 -OR) 12-x (NO 3 ) 6 (R′) x ] 2− wherein: R represents a C 1-10 alkyl, R′ represents acrylate or methacrylate, and x represents 1-10. 8. The liquid coating composition according to claim 1 , comprising phenylbis(2,4,6-trimethyl benzoyl)phosphine oxide as the photoinitiator.
Radiation by light, e.g. photolysis or pyrolysis · CPC title
Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur · CPC title
Compounds containing elements of Groups 3 or 13 of the Periodic Table · CPC title
with photosensitivity-increasing substances, e.g. photoinitiators · CPC title
Metal oxides (C23C18/1212 takes precedence) · CPC title
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