Method for producing high-performing and electrically stable semi-conductive metal oxide layers, layers produced according to the method and use thereof

Patent metadata

Field	Value
Publication number	US-9059299-B2
Application number	US-201214348948-A
Country	US
Kind code	B2
Filing date	Sep 12, 2012
Priority date	Oct 7, 2011
Publication date	Jun 16, 2015
Grant date	Jun 16, 2015

Abstract

The present invention relates to a method for producing a semi-conductor laminate comprising a first and a second metal oxide layer as well as a dielectric layer, wherein the first metal oxide layer is arranged between the second metal oxide layer and the dielectric layer. The first and second metal oxide layers are formed accordingly from a first and a second liquid phase. The present invention also relates to a semi-conductor laminate that can be obtained from such a method, and to electronic components comprising such a semi-conductor laminate.

First claim

The invention claimed is:

1. A process for producing a semiconductor laminate comprising a first metal oxide layer, a second metal oxide layer and a dielectric layer, wherein the first metal oxide layer is arranged between the second metal oxide layer and the dielectric layer,
the process comprising:
forming a first metal oxide layer comprising at least one metal oxide selected from the group consisting of indium oxide, gallium oxide, zinc oxide, and tin oxide from a first liquid phase, wherein the first metal oxide layer has a layer thickness of ≦20 nm, the first liquid phase comprises a metal oxide or a metal oxide precursor, and the metal oxide is selected from the group consisting of indium oxide, gallium oxide, zinc oxide, and tin oxide; and
forming a second metal oxide layer comprising at least one metal oxide selected from the group consisting of gallium oxide, zinc oxide, tin oxide, hafnium oxide, silicon oxide, aluminium oxide, titanium oxide, alkali metal oxides, and alkaline earth metal oxides from a second liquid phase, wherein the second liquid phase comprises a metal oxide or a metal oxide precursor, and the metal oxide is selected from the group consisting of gallium oxide, zinc oxide, tin oxide, hafnium oxide, silicon oxide, aluminium oxide, titanium oxide, alkali metal oxides, and alkaline earth metal oxides,
wherein the metal oxide of the first layer and the metal oxide of the second layer are different.

2. The process according to claim 1 , wherein the first metal oxide layer has a layer thickness of 0.5-20 nm.

3. The process according to claim 1 , wherein the second metal oxide layer has at least a layer thickness of the first metal oxide layer.

4. The process according to claim 1 , wherein the second metal oxide layer comprises a metal oxide not present in the first metal oxide layer.

5. The process according to claim 1 , wherein the second metal oxide layer comprises at least two metal oxides.

6. The process according to claim 1 , wherein the first metal oxide layer comprises at least two metal oxides.

7. The process according to claim 1 , wherein the second metal oxide layer comprises silicon oxide.

8. The process according to claim 1 , wherein the first metal oxide layer consists essentially of indium oxide (In 2 O 3 ) or indium gallium oxide.

9. The process according to claim 1 , wherein the second metal oxide layer consists essentially of ZnO, Ga 2 O 3 , HfO 2 , SiO 2 , silicon gallium oxide or silicon hafnium oxide.

10. The process according to claim 1 , wherein the forming of the first metal oxide layer comprises:
applying the first liquid phase to the dielectric layer, and
depositing the metal oxide or the metal oxide precursor of the first liquid phase on the dielectric layer in order to form the first metal oxide layer on the dielectric layer,
and wherein the forming of the second metal oxide layer comprises:
applying the second liquid phase to the first metal oxide layer, and
depositing the metal oxide or the metal oxide precursor of the second liquid phase on the first metal oxide layer in order to form the second metal oxide layer on the first metal oxide layer.

11. The process according to claim 1 , wherein the forming of the second metal oxide layer comprises:
applying the second liquid phase on a substrate, and
depositing the metal oxide or the metal oxide precursor of the second liquid phase on the substrate in order to form the second metal oxide layer on the substrate,
and wherein the forming of the first metal oxide layer comprises:
applying the first liquid phase to the second metal oxide layer,
depositing the metal oxide or the metal oxide precursor of the first liquid phase on the second metal oxide layer in order to form the first metal oxide layer on the second metal oxide layer, and
applying the dielectric layer to the first metal oxide layer.

12. The process according to claim 1 , wherein the first liquid phase, the second liquid phase, or both, are applied by at least one process selected from the group consisting of a printing process, spraying process, rotary coating process, dipping process and slot-die coating.

13. The process according to claim 1 , wherein the metal oxide precursor of the first liquid phase, the second liquid phase, or both, originates from a class of metal alkoxides, metal oxo alkoxides, or both.

14. The process according to claim 13 , wherein the first liquid phase, the second liquid phase, or both, comprise an organic solvent.

15. The process according to claim 14 , wherein the organic solvent is essentially anhydrous.

16. The process according to claim 1 , wherein the first liquid phase, the second liquid phase, or both, comprise a metal oxide of a metal oxide particle type.

17. The process according to claim 1 , wherein the first liquid phase, the second liquid phase, or both, comprise an aqueous phase.

18. The process according to claim 1 , wherein the forming of the first metal oxide layer, the second metal oxide layer, or both, further comprises a heat treatment of the first liquid phase, the second liquid phase, or both.

19. The process according to claim 1 , wherein the forming of the first metal oxide layer, the second metal oxide layer, or both, comprises irradiation of the first liquid phase, the second liquid phase, or both, with electromagnetic radiation.

20. The process according to claim 1 , wherein the first metal oxide layer, the second metal oxide layer, or both, are formed under an oxygenous atmosphere.

21. The process according to claim 1 , wherein the first metal oxide layer, the second metal oxide layer, or both, are heat-treated at a temperature of 100-450° C.

22. The process according to claim 1 , wherein the first metal oxide layer has a layer thickness of 0.5-10 nm.

23. A semiconductor laminate, produced by the process of claim 1 .

24. An electronic component, comprising a semiconductor laminate according to claim 23 .

25. The electronic component according to claim 24 , wherein the electronic component is a transistor, a thin-film transistor, a diode, a solar cell, a sensor, an RFID tag or a TFT back panel suitable for visual display units.

Assignees

• Steiger Juergen
• Pham Duy Vu
• Neumann Anita
• Merkulov Alexey
• Hoppe Arne
• Evonik Degussa Gmbh

Inventors

• Steiger Juergen
• Pham Duy Vu
• Neumann Anita
• Merkulov Alexey
• Hoppe Arne

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3426

  Oxides · CPC title

• H10P14/3234

  being oxide semiconducting materials (Group IIB-VIA semiconductors H10P14/3224) · CPC title

• H10P14/3226 Primary

  Oxides · CPC title

• H10P14/265

  using solutions · CPC title