MEMS-based method for manufacturing sensor

Patent metadata

Field	Value
Publication number	US-9975766-B2
Application number	US-201515312146-A
Country	US
Kind code	B2
Filing date	May 5, 2015
Priority date	May 28, 2014
Publication date	May 22, 2018
Grant date	May 22, 2018

Abstract

An MEMS-based method for manufacturing a sensor comprises the steps of: forming a shallow channel ( 120 ) and a support beam ( 140 ) on a front surface of a substrate ( 100 ); forming a first epitaxial layer ( 200 ) on the front surface of the substrate ( 100 ) to seal the shallow channel ( 120 ); forming a suspended mesh structure ( 160 ) below the first epitaxial layer ( 200 ); and forming a deep channel ( 180 ) at a position on a back surface of the substrate ( 100 ) corresponding to the shallow channel ( 120 ), so that the shallow channel ( 120 ) is in communication with the deep channel ( 180 ). In the Method of manufacturing a MEMS-based sensor, when a shallow channel is formed on a front surface, a support beam of a mass block is formed, so the etching of a channel is easier to control, the process is more precise, and the uniformity and the homogeneity of the formed support beam are better.

First claim

What is claimed is:

1. A method of manufacturing a MEMS-based sensor, comprising the following steps:
providing a substrate;
forming a shallow channel and a support beam on a front surface of the substrate;
forming a first epitaxial layer on the front surface of the substrate to seal the shallow channel;
forming a suspended meshed structure beneath the first epitaxial layer;
forming a second epitaxial layer on the first epitaxial layer;
forming a circuit layer on the second epitaxial layer;
forming a deep channel on a position of a back surface of the substrate corresponding to the shallow channel, such that the shallow channel is in communication with the deep channel; and
removing the support beam.

2. The method according to claim 1 , wherein the shallow channel and the support beam are formed on the front surface of the substrate by etching technology.

3. The method according to claim 1 , wherein the shallow channel has a depth ranging from 50 μm to 100 μm.

4. The method according to claim 1 , wherein the first epitaxial layer has a thickness ranging from 5 μm to 10 μm.

5. The method according to claim 1 , wherein the second epitaxial layer has a thickness ranging from 12 μm to 20 μm.

6. The method according to claim 1 , wherein technologies for forming a circuit layer on the second epitaxial layer comprise photolithography, implantation, diffusion, and etching.

7. The method according to claim 1 , wherein the deep channel is formed on the position of the back surface of the substrate corresponding to the shallow channel by etching technology.

8. The method according to claim 1 , wherein the deep channel has a depth ranging from 300 μm to 400 μm.

9. The method according to claim 1 , wherein the support beam is removed by performing an etching technology to support beam from the back surface of the substrate.

10. The method according to claim 1 , wherein a number of the support beams is four.

Assignees

• Csmc Technologies Fab1 Co Ltd
• Csmc Tech Fabi Co Ltd

Inventors

• Hu Yonggang
• Zhou Guoping

Classifications

• G01L9/0054

  integral with a semiconducting diaphragm · CPC title

• G01L9/0042

  Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms (details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively) · CPC title

• B81C1/00182 Primary

  Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer · CPC title

• B81C1/00

  Manufacture or treatment of devices or systems in or on a substrate (B81C3/00 takes precedence) · CPC title

• B81B2201/0264

  Pressure sensors · CPC title