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Membrane of amorphous carbon and MEMS including such a membrane
US9975755B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9975755-B2 |
| Application number | US-201715455450-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 10, 2017 |
| Priority date | Mar 10, 2016 |
| Publication date | May 22, 2018 |
| Grant date | May 22, 2018 |
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Abstract
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A microelectromechanical system includes a membrane of amorphous carbon having a thickness between 1 nm and 50 nm, and for example between 3 nm and 20 nm.
First claim
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The invention claimed is: 1. A microelectromechanical system including a membrane of amorphous carbon, wherein the membrane of amorphous carbon has a thickness between 1 nm and 50 nm, wherein the membrane of amorphous carbon has an sp 3 type hybridization rate between 20% and 40%, and wherein the microelectromechanical system is a piezoelectric transducer. 2. The microelectromechanical system according to claim 1 , wherein the thickness is between 3 nm and 20 nm. 3. The microelectromechanical system according to claim 1 , further comprising a movable membrane including the membrane of amorphous carbon. 4. The microelectromechanical system according to the claim 3 , wherein the movable membrane includes a main membrane, the main membrane being coated with the membrane of amorphous carbon.
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Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039) · CPC title
Protective layers applied directly to the device before packaging · CPC title
For improving wear resistance · CPC title
Bio-MEMS · CPC title
- B81B3/0089Primary
Chemical or biological characteristics, e.g. layer which makes a surface chemically active · CPC title
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- What does patent US9975755B2 cover?
- A microelectromechanical system includes a membrane of amorphous carbon having a thickness between 1 nm and 50 nm, and for example between 3 nm and 20 nm.
- Who is the assignee on this patent?
- Commissariat Energie Atomique
- What technology area does this patent fall under?
- Primary CPC classification B81B3/0089. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue May 22 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).