Gas purge device and gas purge method

Patent metadata

Field	Value
Publication number	US-9972518-B2
Application number	US-201414906946-A
Country	US
Kind code	B2
Filing date	Jun 2, 2014
Priority date	Aug 20, 2013
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

A gas inlet made of an elastic material is prevented from getting scratched by contact with a nozzle, and adhesion between the gas inlet and the nozzle is prevented. A container is positioned, and a purge gas is introduced from the nozzle into a gas inlet hole in the center of a circular bottom surface of the gas inlet provided on the bottom of the container. The nozzle has a planar top end surface having a size equal to or greater than that of the bottom surface of the gas inlet, and a nozzle hole in the center of the top end surface, and has a size equal to or smaller than that of the gas inlet hole. The top end surface is roughened or includes a lubricant so that the top end surface and the gas inlet are mutually slidable.

First claim

What is claimed is:

1. A gas purge device positioning a container and comprising:
a nozzle to introduce a purge gas into a gas inlet; wherein
the gas inlet is made of an elastic material, provided on a bottom of the container, and provided with a circular bottom surface and a gas inlet hole in a center of the bottom surface;
the nozzle is provided with a top end surface having a size equal to or greater than that of the bottom surface of the gas inlet, and a nozzle hole located in a center of the top end surface and having a size equal to or smaller than that of the gas inlet hole of the container;
the top end surface is planar and protrudes upward from a top end of the nozzle such that the top end surface is an uppermost surface of the nozzle; and
the top end surface includes a lubricant or is roughened by bead blasting or cutting, and supports the gas inlet slidably.

2. The gas purge device according to claim 1 , wherein the top end surface has a diameter equal to or greater than that of the gas inlet, and the nozzle hole has a diameter equal to or smaller than that of the gas inlet hole.

3. The gas purge device according to claim 2 , wherein the top end surface contacts an entire surface of the gas inlet except for the gas inlet hole, to support the gas inlet, to apply a uniform or substantially uniform contact pressure from the nozzle to an entire surface of the gas inlet except for the gas inlet hole, to make the gas inlet slidable with respect to the top end surface, and to prevent adhesion between the gas inlet and the top end surface when positioning the container.

4. The gas purge device according to claim 1 , wherein the top end surface is roughened.

5. The gas purge device according to claim 1 , further comprising:
a rack support; and
positioning members provided on the rack support; wherein
the positioning members position the container on the rack support; and
the nozzle is fixed on the rack support at a fixed height so as not to move up and down.

6. A gas purge method comprising positioning a container and introducing a purge gas from a nozzle into a gas inlet, wherein
the gas inlet is made of an elastic material, provided on a bottom of the container, and provided with a circular bottom surface and a gas inlet hole in a center of the bottom surface;
the nozzle has a top end surface having a size equal to or greater than that of the bottom surface of the gas inlet, and a nozzle hole located in a center of the top end surface and having a size equal to or smaller than that of the gas inlet hole of the container;
the nozzle applies a contact pressure to an entire surface of the gas inlet except for the gas inlet hole;
the top end surface is planar and protrudes upward from a top end of the nozzle such that the top end surface is an uppermost surface of the nozzle;
the top end surface includes a lubricant or is roughened by bead blasting or cutting; and
the gas inlet is slidable with respect to the top end surface.

7. The gas purge method according to claim 6 , wherein
the top end surface contacts with an entire surface of the gas inlet except for the gas inlet hole and applies a uniform or substantially uniform contact pressure from the nozzle to the entire surface of the gas inlet except for the gas inlet hole, and prevents application of a mark and a scratch on the gas inlet; and
adhesion between the gas inlet and the top end surface is prevented while positioning the container.

8. The gas purge device according to claim 4 , wherein the top end surface roughening is defined by recesses and projections.

9. The gas purge device according to claim 8 , wherein the recesses and the projections are arranged in a circular or spiral shape on the top end surface.

10. The gas purge device according to claim 9 , wherein the top end surface is roughened by bead blasting.

11. The gas purge device according to claim 1 , wherein the bottom surface of the gas inlet is made of the elastic material.

12. The gas purge device according to claim 1 , wherein the elastic material of the gas inlet is rubber.

Assignees

• Murata Machinery Ltd

Inventors

• Murata Masanao
• Yamaji Takashi

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1924 Primary

  characterised by atmosphere control · CPC title

• H01L21/67393

  Electricity · mapped topic

• G03F1/66 Primary

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title

• H01L21/67389 Primary

  Electricity · mapped topic