Film-forming material for semiconductor, member-forming material for semiconductor, process member-forming material for semiconductor, underlayer film-forming material, underlayer film, and semiconductor device
US-2024352203-A1 · Oct 24, 2024 · US
US9971243B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9971243-B2 |
| Application number | US-201615172351-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 3, 2016 |
| Priority date | Jun 10, 2015 |
| Publication date | May 15, 2018 |
| Grant date | May 15, 2018 |
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A polymer includes a structural unit represented by Chemical Formula 1 and an organic layer composition including the same. wherein in Chemical Formula 1, A is a carbon cyclic group including at least one hetero atom, B is one of groups in Group 1, where Ar 1 to Ar 4 , R 11 to R 14 , L and m are as defined in the specification and * is a linking point. When the carbon cyclic group includes at least two hetero atoms when the carbon cyclic group includes a pentagon cyclic moiety and the pentagon cyclic moiety includes a nitrogen atom (N) as a hetero atom, and the at least two hetero atoms are the same or different:
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What is claimed is: 1. A polymer comprising a structural unit represented by Chemical Formula 1: wherein, in Chemical Formula 1, A is a substituted or unsubstituted cyclic group selected from Group 2: wherein, in Group 2, Z 1 and Z 12 are O, S, Te, or Se, Z 2 , Z 5 , Z 6 , and Z 9 are NR a , O, S, Te, or Se, Z 3 to Z 4 , Z 7 to Z 8 , Z 10 to Z 11 and Z 13 to Z 23 are N, and R a is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom or a combination thereof, wherein in Group 2, a location of linking points is not limited, B is one of groups in Group 1, and * is a linking point, wherein, in the Group 1, Ar 1 to Ar 4 are each independently a substituted or unsubstituted C6 to C30 aryl group, R 11 to R 14 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkylether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, g to j are each independently an integer ranging from 0 to 2, L is a single bond, a substituted or unsubstituted C1 to C6 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof, m is an integer ranging from 1 to 3, and * is a linking point. 2. The polymer as claimed in claim 1 , wherein the hetero atom is N, O, S, Te, or Se. 3. The polymer as claimed in claim 1 , wherein: B in Chemical Formula 1 is selected from in Group 1, and Ar 1 to Ar 4 are each independently a substituted or unsubstituted cyclic group selected from Group 3: wherein in Group 3, a location of linking points is not limited. 4. The polymer as claimed in claim 1 , wherein the structural unit represented by Chemical Formula 1 includes one of structural units represented by Chemical Formulae 1-1 to 1-8: wherein, in Chemical Formulae 1-1 to 1-8, Z 101 and Z 104 are N, Z 102 is O, S, Te, or Se, Z 103 is NR a , O, S, Te, or Se, R a and R 101 are hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom, or a combination thereof, and * is a linking point. 5. The polymer as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 500 to about 20,000. 6. An organic layer composition, comprising a polymer including a structural unit represented by Chemical Formula 1 and a solvent: wherein, in Chemical Formula 1, A is a substituted or unsubstituted cyclic group selected from Group 2: wherein, in Group 2, Z 1 and Z 12 are O, S, Te, or Se, Z 2 , Z 5 , Z 6 , and Z 9 are NR a , O, S, Te, or Se, Z 3 to Z 4 , Z 7 to Z 8 , Z 10 to Z 11 and Z 13 to Z 23 are N, and R a is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom or a combination thereof, wherein in Group 2, a location of linking points is not limited, B is one of groups in Group 1, and * is a linking point, wherein, in Group 1, Ar 1 to Ar 4 are each independently a substituted or unsubstituted C6 to C30 aryl group, R 11 to R 14 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkylether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, g to j are each independently an integer ranging from 0 to 2, L is a single bond, a substituted or unsubstituted C1 to C6 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof, m is an integer ranging from 1 to 3, and * is a linking point. 7. The organic layer composition as claimed in claim 6 , wherein the hetero atom is N, O, S, Te, or Se. 8. The organic layer c
Condensation polymers of aldehydes or ketones with aromatic hydrocarbons or halogenated aromatic hydrocarbons only · CPC title
Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C09D107/00 - C09D157/00, C09D161/00 take precedence); Coating compositions based on derivatives of such polymers · CPC title
containing nitrogen and oxygen as heteroatoms · CPC title
Copolymers · CPC title
Condensation polymers of aldehydes or ketones with aromatic hydrocarbons or their halogen derivatives only · CPC title
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